1 GHz bulk acoustic wave slanted finger interdigital transducers in aluminum nitride for wideband applications

Kuo, Nai-Kuei; Fernandez, Jeronimo Segovia; Piazza, Gianluca

doi:10.1109/fcs.2012.6243638

Cited by 6 publications

(2 citation statements)

References 8 publications

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“…The overall delay line formed by two SFITs and an AlN slab can be analyzed as a three-port equivalent circuit that represents the input/output electroacoustic transduction and the acoustic transmission between the two SFITs [9]. Assuming reciprocity, non-reflective identical SFITs, and loss-free wave propagation along the AlN plate, the overall insertion loss can be simplified into the following equation given an input and output electrical termination (R in and R out ):…”

Section: A Aln Lamb Wave Sfitsmentioning

confidence: 99%

X-shaped phononic crystals for side lobe reduction in ultra high frequency slanted finger inter-digitated aluminum nitride lamb wave transducers

Kuo

Piazza

2012

2012 IEEE International Ultrasonics Symposium

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This paper reports, for the first time, an approach to suppress the side lobe magnitude of aluminum nitride (AlN) Lamb wave slanted finger interdigital transducer (SFIT) delay lines by engineering and integrating an X-shaped phononic crystal (X-PnC) in the structure. The X-PnC generates two frequency bandgaps that sandwich the delay line pass-band around 780 MHz. The acoustic isolation provided by these two frequency bandgaps for longitudinal modes results in a side lobe reduction of 10 dB. The combined result of the X-PnC and the delay line displays an unaltered bandwidth similar to the standalone delay line with a minimum 23 dB of insertion loss and a smooth (almost flat) out-of-band response. These preliminary results demonstrate the feasibility of integrating PnCs with radio frequency electroacoustic devices, and especially show a practical utilization of micromachined PnCs.

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Section: A Aln Lamb Wave Sfitsmentioning

confidence: 99%

X-shaped phononic crystals for side lobe reduction in ultra high frequency slanted finger inter-digitated aluminum nitride lamb wave transducers

Kuo

Piazza

2012

2012 IEEE International Ultrasonics Symposium

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“…As the tether width decreases, fewer phonons pass through; thus, the bandwidth of the PBG increases. In order to realize the symmetric Lamb wave PBG and cavity resonators, the PnCs and AlN Lamb wave slanted finger interdigital transducers (SFITs) [12] are integrated in the same plane. The SFITs play the role of the phonon source and detector over a wide frequency range.…”

Section: B Design Of the Pbgsmentioning

confidence: 99%

Ultra high frequency resonant cavity in Aluminum Nitride phononic crystals

Kuo

Piazza

2012

2012 IEEE International Ultrasonics Symposium

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This paper presents the first experimental demonstration of the ultra high frequency (UHF) phononic crystal (PnC) resonant cavities in Aluminum Nitride (AlN) sputtered films. Two types of square lattice designs were investigated: the conventional PnC with air circular scatterer and the inverse acoustic band gap (IABG) structure. By removing 3 periods of PnC columns in the array, a cavity is formed to trap acoustic energy within, which results in a resonance in the frequency domain. The designed PnC cavities exhibited resonant frequencies about 660 MHz with quality factors of 675 and 220 for the conventional circular air scatterer PnCs and IABG, respectively. The IABG cavity also showed another resonance at a higher frequency of 916 MHz with Q of 525. More intriguingly, the cavities displayed low intrinsic acoustic loss (as low as 4 dB in the normalized response). These preliminary results are an important stepping stone in showing potential use of PnC for signal processing and frequency referencing.

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Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

Lin

Yantchev

Zou

et al. 2014

J. Microelectromech. Syst.

122

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1 GHz bulk acoustic wave slanted finger interdigital transducers in aluminum nitride for wideband applications

Cited by 6 publications

References 8 publications

X-shaped phononic crystals for side lobe reduction in ultra high frequency slanted finger inter-digitated aluminum nitride lamb wave transducers

X-shaped phononic crystals for side lobe reduction in ultra high frequency slanted finger inter-digitated aluminum nitride lamb wave transducers

Ultra high frequency resonant cavity in Aluminum Nitride phononic crystals

Micromachined One-Port Aluminum Nitride Lamb Wave Resonators Utilizing the Lowest-Order Symmetric Mode

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