1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode

Wang, Linlin; Quan, Aojie; Wang, Yuan; Wang, Chenxi; Kraft, Michael; Wang, Chen

doi:10.1109/jsen.2024.3402101

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2024.3402101

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1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode

Linlin Wang,

Aojie Quan,

Yuan Wang

et al.

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1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode

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