1.2 Tbps/cm<sup>2</sup> Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Mogami, Tohru; Horikawa, Tsuyoshi; Kinoshita, Keizo; Hagihara, Yoshihiro; Ushida, Jun; Tokushima, Masatoshi; Fujikata, Junichi; Takahashi, Shigeki; Shimizu, Takanori; Ukita, Akio; Takemura, Koichi; Kurihara, Minoru; Yashiki, Kenichiro; Okamoto, Daisuke; Suzuki, Yoshishige; Sobu, Yohei; Jeong, Seok–Hwan; Tao, Yu; Nakamura, Takahiro; Kurata, K.

doi:10.1109/jlt.2018.2863779

Cited by 13 publications

(8 citation statements)

References 23 publications

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“…ArFimmersion lithography enables us to create low-loss and high-uniformity optical waveguide. We achieved low waveguide loss of 1.28 dB/cm for the O-band [4] and highlyuniform wavelength distribution of 2 nm (3σ) for a resonant peak of coupled resonator optical waveguides (CROWs) on the entire 300 mm wafer [5]. We also developed a germanium selective epitaxy process for photodetectors (PDs).…”

Section: Design and Structure Of Optical I/o Corementioning

confidence: 99%

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

Nakamura

Yashiki²,

Mizutani

et al. 2019

IEICE Trans. Electron.

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Optical I/O core based on silicon photonics technology and optical/electrical assembly was developed as a fingertip-size optical module with high bandwidth density, low power consumption, and high temperature operation. The advantages of the optical I/O core, including hybrid integration of quantum dot laser diode and optical pin, allow us to achieve 300-m transmission at 25 Gbps per channel when optical I/O core is mounted around field-programmable gate array without clock data recovery.

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Section: Design and Structure Of Optical I/o Corementioning

confidence: 99%

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

Nakamura

Yashiki²,

Mizutani

et al. 2019

IEICE Trans. Electron.

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“…The nonreturn-to-zero optical input signals at a wavelength of 1310 nm were generated using a lithium niobate modulator to investigate the characteristics of the receiver. Signals of the pseudorandom binary sequence (PRBS) 2 31 − 1 had a 14 dB extinction ratio, 10 ps rise/fall time, and 1.0 ps root-meansquare jitter at 25 Gbps. The average input power of −10 dBm corresponded to an optical modulation amplitude (OMA) of −7.3 dBm.…”

Section: Measured Dependence Between Receiver Characteristics and Tem...mentioning

confidence: 99%

25 Gbps × four-channel chip-scale optical receiver operating at up to 85 °C with a temperature-compensation function

Okamoto

Suzuki

Hagihara³

et al. 2019

Jpn. J. Appl. Phys.

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We successfully developed a 5 × 5 mm2 chip-scale optical receiver using silicon photonics technology. The optical receiver was integrated with a 28 nm CMOS transimpedance-amplifier chip designed to have a temperature-compensation function to achieve stable operation at high temperatures. Error-free operations were demonstrated for signals of the 25 Gbps pseudorandom binary sequence 231 − 1 at 25 °C and 85 °C using the compensation function. The minimum sensitivities and transimpedance gains were −9.5 dBm and 76.6 dB Ω at 25 °C, and −8.9 dBm and 76.7 dB Ω at 85 °C, respectively. We also verified the uniform characteristics of the four channels of the receiver with a sensitivity variation of 0.2 dB. These stable operations at a high temperature, and the uniform characteristics of the four channels indicate that our receiver can be used for 100 Gbps (25 Gbps × four-channel) applications at high temperatures.

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“…Among the trends in optical interconnect technologies [1], an important part of improving communications is to use a hybrid technology, based on electronics and photonics, in a CMOS-type silicon microdevice to realize microscale optical communication functions and increase the operating bandwidth of devices [2]. The basic functions required by hybrid devices, e.g., coupling, modulation, and detection of an optical communication signal can be realized by narrow waveguides, ring resonators [3], and fiber-towaveguide grating couplers [4][5][6]. A grating coupler is a periodic structure that allows coupling of a fiber to a waveguide and viceversa, being an important issue in integrated photonics microdevices.…”

Section: Introductionmentioning

confidence: 99%

Desing of grating couplers for submicron optical waveguides

Lugo¹,

García-Guerrero²,

Inzunza-González³

et al. 2023

Rev. Mex. Fís.

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Optical coupling gratings are strategic components of integrated optics that allow the interaction of a laser signal with optical interconnects, integrated photonic microdevices and biosensors. In this work, the design of binary and sinusoidal type coupling gratings for Al2O3/SiO2/Si submicron guides operating in the visible (633 nm) and infrared (1550 nm) is presented herein. In particular, the coupling efficiency is analyzed as a function of the main design parameters: waveguide thickness, period, etch depth and incidence angle. The results indicate that coupling efficiencies of 21 and 15 percent and decoupling efficiencies of 25 and 22 percent can be obtained for binary and sinusoidal gratings, respectively, at a wavelength of 1550 nm; coupling efficiencies of 7.8 and 7.6 percent and decoupling efficiencies of 53 and 34 percent can be obtained for a wavelength of 633 nm. The proposed designs have potential applications for the fabrication of integrated circuits.

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1.2 Tbps/cm² Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Cited by 13 publications

References 23 publications

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

25 Gbps × four-channel chip-scale optical receiver operating at up to 85 °C with a temperature-compensation function

Desing of grating couplers for submicron optical waveguides

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1.2 Tbps/cm2 Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform

Cited by 13 publications

References 23 publications

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

Fingertip-Size Optical Module, “Optical I/O Core”, and Its Application in FPGA

25 Gbps × four-channel chip-scale optical receiver operating at up to 85 °C with a temperature-compensation function

Desing of grating couplers for submicron optical waveguides

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Product

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1.2 Tbps/cm² Enabling Silicon Photonics IC Technology Based on 40-nm Generation Platform