2018
DOI: 10.48550/arxiv.1809.03544
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0.52 V-mm ITO-based Mach-Zehnder Modulator in Silicon Photonics

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“…In contrast, hybrid or heterogeneous photonic integration solutions offer an appealing approach, when combined with an optical low-loss, yet commercially accessible large volume and low-cost CMOS fabrication technology such as Si/SiN photonics [16][17][18][19]. Other active opto-electronic materials such as transparent conductive oxides, while showing high switching performance, usually introduce relatively high optical losses [20].…”
Section: Introductionmentioning
confidence: 99%
“…In contrast, hybrid or heterogeneous photonic integration solutions offer an appealing approach, when combined with an optical low-loss, yet commercially accessible large volume and low-cost CMOS fabrication technology such as Si/SiN photonics [16][17][18][19]. Other active opto-electronic materials such as transparent conductive oxides, while showing high switching performance, usually introduce relatively high optical losses [20].…”
Section: Introductionmentioning
confidence: 99%
“…This carrier modulation translates into either a refractive index or absorption change [12]. For this reason, ITO has been largely employed as an active material in electro-optics modulator [13][14][15][16][17][18][19][20] in integrated photonics devices and plasmonic metasurfaces [21][22][23][24], specifically displaying high performance optical electro-refractive modulation [25]. In this regard, recently, new possibilities are emerging to use ITO as an active material in sub-wavelength waveguide integrated electro-optics modulators, which showed high performances regarding extinction ratio dB/µm [7,[26][27][28].…”
Section: Introductionmentioning
confidence: 99%