2023 IEEE 73rd Electronic Components and Technology Conference (ECTC) 2023
DOI: 10.1109/ectc51909.2023.00188
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0.5 μm Pitch Next Generation Hybrid Bonding with High Alignment Accuracy for 3D Integration

Christopher Netzband,
Kevin Ryan,
Yuji Mimura
et al.
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Cited by 6 publications
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