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Digest. International Electron Devices Meeting,
DOI: 10.1109/iedm.2002.1175927
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0.1 μm RFCMOS on high resistivity substrates for system on chip (SOC) applications

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Cited by 15 publications
(6 citation statements)
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“…It has several advantages over bulk silicon for these applications; perhaps most importantly it enables the use of a high resistivity silicon substrate. High resistivity cm silicon reduces substrate RF power loss, conferring considerable benefits to the active and passive elements of an RF system [1]. High resistivity bulk silicon offers the same RF performance advantages as high resistivity SOI, but is believed to pose reliability and yield problems [2], [3].…”
Section: Introductionmentioning
confidence: 99%
“…It has several advantages over bulk silicon for these applications; perhaps most importantly it enables the use of a high resistivity silicon substrate. High resistivity cm silicon reduces substrate RF power loss, conferring considerable benefits to the active and passive elements of an RF system [1]. High resistivity bulk silicon offers the same RF performance advantages as high resistivity SOI, but is believed to pose reliability and yield problems [2], [3].…”
Section: Introductionmentioning
confidence: 99%
“…Fig.7 shows a collection of the cut-off frequencies from publications [4,[8][9][10][11][12][13]. It shows that a typical SiGe bipolar transistor inserted two technology nodes behind (less advanced) can offer the same cut-off frequency as CMOS.…”
Section: -5-3mentioning
confidence: 98%
“…Recently, technologies to form global and local high-resistivity silicon region on Silicon substrate are being studied [13][14][15]. One of the promising approaches is to bombard a selected area of the silicon substrate with MeV protons [ 16,171 through a mask, forming a local semi-insulating region -100 pm deep.…”
Section: Substrate and Passivesmentioning
confidence: 99%
“…nodes can be reduced by logic. [13,141 Power management is becoming increasingly distributed, especially in low power applications, because of the need to reduce standby power by putting unused logic and memory in a standby or sleep mode. Much of this power management functionality can be accomplished using switches to activate or deactivate blocks of logic.…”
Section: Fig 4: Digital Clock Noise Is Conducted To Sensitive Analog mentioning
confidence: 99%