The effects of fluorination on amorphous indium gallium zinc oxide thin-film transistors and circuits fabricated on a polyimide flexible substrate were studied. Attributed to more effective passivation of donor defects for a given thermal budget, fluorination resulted in suppressed apparent short-channel effects and better uniformity of turn-on voltage with reduced negative shift after laser lift-off from a glass carrier substrate. As representative digital circuits, two-input four-output (2-4) decoders were fabricated and characterized to demonstrate the advantages of incorporating fluorination in the construction of circuit building blocks, leading to higher gain, wider noise margins, more tightly distributed transition voltage, and larger output swing.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.