We present the methodology used to fabricate an X-ray reflection grating and describe a technique for grating replication. Further, we present the experimental procedure and results of a study to measure the diffraction efficiency of a replicated X-ray reflection grating in an extreme off-plane geometry. The blazed grating demonstrates a total diffraction efficiency of ∼60% from 0.34 to 1.2 keV at a grazing angle of ∼1.°5, with single-order efficiency ranging from ∼35% to 65% for energies within the blaze envelope. The diffraction efficiency of the grating measured relative to the reflectivity of the metal coating averages ∼90% above 0.34 keV. Data collected as a function of beam position on the grating indicate a relative variation in total efficiency of <1% rms across the grating surface.

Future observatories utilizing reflection grating spectrometers for extreme ultraviolet (EUV) and soft x-ray (SXR) spectroscopy require high-fidelity gratings with both blazed groove facets and custom groove layouts that are often fanned or feature a slight curvature. While fabrication procedures centering on wet anisotropic etching in mono-crystalline silicon produce highly-efficient blazed gratings, the precision of a non-parallel groove layout is limited by the cubic structure of the silicon crystal. This motivates the pursuit of alternative techniques to grating manufacture, namely thermally activated selective topography equilibration (TASTE), which uses grayscale electron-beam lithography to pattern multi-leveled structures in resist followed by an optimized polymer thermal reflow to smooth the 3D patterns into continuous surface relief profiles. Using TASTE, a mold for a reflection grating with a periodicity of 400 nm and grooves resembling an asymmetric sawtooth was patterned in 130 nmthick poly(methyl methacrylate) resist on a silicon substrate over a 50 mm by 7.5 mm area. This structure was coated with 15 nm of gold by electron-beam physical vapor deposition using titanium as an adhesion layer and then tested for EUV and SXR diffraction efficiency at beamline 6.3.2 of the Advanced Light Source synchrotron facility. Results demonstrate a quasi-blaze response characteristic of a 27 • blaze angle with groove facets smooth to 1.5 nm RMS. Absolute peak order efficiency ranges from 75% to 25% while total relative efficiency measures 90% across the measured bandpass of 15.5 nm > λ > 1.55 nm.

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Thermally activated selective topography equilibration (TASTE) enables the creation of 3D structures in resist using grayscale electron-beam lithography followed by a thermal treatment to induce a selective polymer reflow. A blazed grating topography can be created by reflowing repeating staircase patterns in resist into wedge-like structures. Motivated by astronomical applications, such patterns with periodicities 840 nm and 400 nm have been fabricated in 130 nm-thick PMMA using TASTE to provide a base for X-ray reflection gratings. A path forward to integrate this alternative blazing technique into grating fabrication recipes is discussed.