Measurements of bremsstrahlung down to 7 keV emitted from a 7.25 GHz electron cyclotron resonance discharge and the deconvolution of the spectra using a newly developed integration method yield the exact electron distribution function. Two separate electron populations with temperatures about 3 and 25 keV and with densities about (0.2...4)108 cm−3 were recorded. First, results are obtained for the behavior of these populations belonging to the mixture (argon–oxygen–hydrogen). Gas mixing increases the densities of these populations, but hardly changes the temperatures.
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