Nowadays, millimeter scale power sources are key devices for providing autonomy to smart, connected and miniaturized sensors. However, until now, planar solid state microbatteries do not yet exhibit a sufficient surface energy density. In that context, architectured 3D (3 dimensional) microbatteries appear therefore to be a good solution to improve the material mass loading while keeping small the footprint area. Beside the design itself of the 3D microbaterry, one important technological barrier to address is the conformal deposition of thin films (lithiated or not) on 3D structures. For that purpose, Atomic Layer Deposition (ALD) technology is a powerful technique that enable conformal coatings of thin film on complex substrate. In this paper, an original, robust and highly efficient 3D scaffold is proposed to significantly improve the geometrical surface of miniaturized 3D microbattery.Four functional layers composing the 3D lithium ion microbattery stacking has been Received: ((will be filled in by the editorial staff))Revised: ((will be filled in by the editorial staff))
A uniform array of single-grain Au nanodots, as small as 5-8 nm, can be formed on silicon using e-beam lithography. The as-fabricated nanodots are amorphous, and thermal annealing converts them to pure Au single crystals covered with a thin SiO(2) layer. These findings are based on physical measurements, such as atomic force microscopy (AFM), atomic-resolution scanning transmission electron microscopy, and chemical techniques using energy dispersive X-ray spectroscopy. A self-assembled organic monolayer is grafted on the nanodots and characterized chemically with nanometric lateral resolution. The extended uniform array of nanodots is used as a new test-bed for molecular electronic devices.
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