We present our results on optical waveguides formed by thermal diffusion of ions in glass. It was found that the peak of the ion-exchanged region can be shifted into the substrate interior by limiting the diffusion process. We also found that low loss films (<0.1 dB/cm) can be fabricated using this process and that the modal losses in these films do not agree with those losses predicted by existing theories. Also, the ion-exchange process has proved to be a simple means for fabricating tapered-edge couplers.
Optical mode measurements have been used to determine the anisotropic diffusion coefficient and surface index changes for planar Ti : LiNbO3 waveguides at 0.633 μm. Measured values for the diffusion coefficient at 1000 °C are 𝒟y=9.4×10−13 and 𝒟z=1.4×10−12 cm2/sec. The ratio of the extraordinary to the ordinary surface index change (Δne/Δn0) was found to vary between 1.3 and 1.8, depending on diffusion temperature and Ti film thickness. Ti and Li concentration profiles were measured by secondary-ion mass spectrometry. Additional high concentration peaks, 0.2–0.3 μm wide for both ions, were found superimposed on otherwise well-behaved diffusion profiles. This observation is interpreted to result from a tendency towards Li-Ti-O compound (Li2TiO3 or Li2Ti3O7) formation at the diffusion temperature in a dilute mixture with LiNbO3. Such compound formation has the effect of impeding the Ti diffusion into the LiNbO3 substrate. Electron microprobe measurements were used to measure lateral diffusion from channel waveguides. Under nominally identical conditions, lateral diffusion coefficients varying by as much as a factor of 3 have been observed. The minimum lateral diffusion coefficients observed at 1000 °C were 𝒟y=9.7×10−13 and 𝒟z=1.4×10−12 cm2/sec.
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