A microelectromechanical system (MEMS) microvalve array for fluid flow control is described. The device consists of a parallel array of surface-micromachined binary microvalves working cooperatively to achieve precision flow control on a macroscopic level. Flow rate across the microvalve array is proportional to the number of microvalves open, yielding a scalable high-precision fluidic control system. Device design and fabrication, using a one-level polycrystalline silicon surface-micromachining process combined with a single anisotropic bulk etching process are detailed. Performance measurements on fabricated devices confirm feasibility of the fluidic control concept and robustness of the electromechanical design. Air-flow rates of 150 ml/min for a pressure differential of 10 kPa were demonstrated. Linear flow control was achieved over a wide range of operating flow rates. A continuum fluidic model based on incompressible low Reynolds number flow theory was implemented using a finitedifference approximation. The model accurately predicted the effect of microvalve diaphragm compliance on flow rate. Excellent agreement between theoretical predictions and experimental data was obtained over the entire range of flow conditions tested experimentally. [351]

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