Thermal properties of oxygen-, phosphorus-, and halogen-free dimethylgold(III) diethyldithiocarbamate complex (CH 3 ) 2 AuS 2 CN(C 2 H 5 ) 2 (gold, dimethyl(diethylcarbamodithioato -S,S′)-) having excellent storage stability and the mechanism of its decomposition to elemental gold were studied. Saturated vapor pressure was found to be~10
10−1 Torr at 50-90°C. Decomposition of the vapor on the surface starts at T=210°C. The temperature dependence of gas phase composition was studied using the original mass spectrometric technique, it was established that the decomposition of the compound on the surface in vacuum follows three main pathways. Two of them result in the formation of elemental gold, saturated C2-C4 alkanes and (1) protonated ligand or (2) methylated ligand. The third one results in elemental gold and gaseous products: C2-C3 alkylmercaptanes and CH 3 SCN(C 2 H 5 ) 2 . The formation of gold as a sole solid product within the temperature range 210-240°C was confirmed by X-ray photoelectron spectroscopy analysis. It was shown that the compound exhibits the best combination of volatility, thermal, and storage stability among volatile organogold complexes and thus it may be a promising precursor for obtaining gold films by chemical vapor deposition.
Using metal-organic (MO)CVD, gold films and arrays of gold nanoparticles are obtained from volatile organometallic dimethylgold(III) complexes with O, N, S donor ligands. As precursors, such compounds as (CH 3 ) 2 Au(OAc), (CH 3 ) 2 Au(piv), (CH 3 ) 2 Au(OQ), (CH 3 ) 2 Au(SQ), (CH 3 ) 2 Au(thd), and (CH 3 ) 2 Au(dtc) were used. Deposition processes are carried out within a low pressure (LP)CVD reactor with additional vacuum ultraviolet (VUV) stimulation, with and without a hydrogen reactant gas. The influence of precursor structure on the morphology of the deposited layers is demonstrated. The use of precursor (CH 3 ) 2 Au(OQ) results in obtaining ultra-thin continuous gold film $3 nm thick. It is established that with hydrogen reactant gas injected into the system, the amount of impurities in the film decreases. With the VUV stimulation, the gold content in the films amounts to almost 100%; in addition, the morphology of coatings is observed to change significantly. According to the X-ray diffraction (XRD) phase analysis, gold crystallites in the films grow mainly in the [111] direction.
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