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The vapor pressures and vapor molecular weights of the copper and yttrium β-diketonate MOCVD precursors Cu(C11H19O2)2 (c) and Y(C11H19O2)3 (c) were measured by a torsion-effusion/mass-loss method in the ranges (346 to 375) K and (361 to 387) K, respectively. The molecular weight data indicate that the saturated vapors of both precursors are highly monomeric. Vapor pressures, estimated to be accurate within 5%, are presented in equation form for reliable extrapolation to higher temperatures. The results are compared with other determinations in the literature.