2017
DOI: 10.21883/jtf.2017.12.45214.2233
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Состав и структура наноразмерных слоев Ga-=SUB=-1-x-=/SUB=-Na-=SUB=-x-=/SUB=-As, созданных в приповерхностной области GaAs имплантацией ионов Na-=SUP=-+-=/SUP=-

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