Volatile detection system using piezoelectric micromechanical resonators interfaced by an oscillator readout

Pettine, Julia; Pătraşcu, Mihai; Karabacak, Devrez M.; Vandecasteele, M.; Petrescu, V.; Brongersma, Sywert; Crego‐Calama, Mercedes; Hoof, Chris Van

doi:10.1016/j.sna.2012.11.003

Cited by 23 publications

(16 citation statements)

References 15 publications

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“…Next, further mixtures can be performed to obtain the desired concentration. Most of the works published in the literature [ 12 , 16 , 18 , 26 , 27 , 28 , 29 , 30 ] use a similar gas injection system as the one depicted in Figure 5 to characterize resonator-based gas sensor. To the best of our knowledge, a detailed investigation into the impact of the gas flow phenomena (without considering any analyte–sensor adsorption nor chemical interaction) on the vibrating mechanical structure is not available.…”

Section: Experimental Setup and Resultsmentioning

confidence: 99%

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Perelló-Roig

Verd

Bota

et al. 2020

Sensors

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Based on experimental data, this paper thoroughly investigates the impact of a gas fluid flow on the behavior of a MEMS resonator specifically oriented to gas sensing. It is demonstrated that the gas stream action itself modifies the device resonance frequency in a way that depends on the resonator clamp shape with a corresponding non-negligible impact on the gravimetric sensor resolution. Results indicate that such an effect must be accounted when designing MEMS resonators with potential applications in the detection of volatile organic compounds (VOCs). In addition, the impact of thermal perturbations was also investigated. Two types of four-anchored CMOS-MEMS plate resonators were designed and fabricated: one with straight anchors, while the other was sustained through folded flexure clamps. The mechanical structures were monolithically integrated together with an embedded readout amplifier to operate as a self-sustained fully integrated oscillator on a commercial CMOS technology, featuring low-cost batch production and easy integration. The folded flexure anchor resonator provided a flow impact reduction of 5× compared to the straight anchor resonator, while the temperature sensitivity was enhanced to −115 ppm/°C, an outstanding result compared to the −2403 ppm/°C measured for the straight anchored structure.

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Section: Experimental Setup and Resultsmentioning

confidence: 99%

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Perelló-Roig

Verd

Bota

et al. 2020

Sensors

View full text Add to dashboard Cite

show abstract

“…The oscillator-based readout scheme has been previously demonstrated to be very accurate in tracking the resonance frequency of the aforementioned resonators. 15,16 However, several technical limitations remain for this approach. It requires the sustaining amplifier to have a well-defined phase shift, which comes at the cost of power consumption, typically around 1 mW for the resonators discussed here.…”

Section: B Oscillator-based Readoutmentioning

confidence: 99%

“…Moreover, with large electrical parasitics, the phase shift of the resonator at resonance becomes small and poorly defined, particularly in μm scale transducers, making it difficult for the sustaining amplifier to provide sufficient phase shift to sustain oscillation without additional efforts of parasitic capacitance cancellation. 15,16 Furthermore, oscillator-based readout cannot readily provide information about the quality factor, which can be used to quantify damping effects on the surface of the resonator or the functionalization layer in some sensing applications.…”

Section: B Oscillator-based Readoutmentioning

confidence: 99%

An energy-efficient readout circuit for resonant sensors based on ring-down measurement

Zhou

Pertijs

Karabacak

2013

Review of Scientific Instruments

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This paper presents an energy-efficient readout circuit for resonant sensors that operates based on a transient measurement method. The resonant sensor is driven at a frequency close to its resonance frequency by an excitation source that can be intermittently disconnected, causing the sensor to oscillate at its resonance frequency with exponentially decaying amplitude. By counting the zero crossings of this ring-down response, the interface circuit can detect the resonance frequency. In contrast with oscillator-based readout, the presented readout circuit is readily able to detect quality factor (Q) of the resonator from the envelope of the ring-down response, and can be used even in the presence of large parasitic capacitors. A prototype of the readout circuit has been integrated in 0.35 μm CMOS technology, and consumes only 36 μA from a 3.3 V supply during a measurement time of 2 ms. The resonance frequency and quality factor of a micro-machined SiN resonator obtained using this prototype are in good agreement with results obtained using impedance analysis. Furthermore, a clear transient response is observed to ethanol flow using the presented readout, demonstrating the use of this technique in sensing applications.

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“…Technologies for detecting gas molecules and biomolecules on miniaturized sensor elements and arrayed using semiconductor microfabrication technology have been developed for targets such as DNA, (1,2) tumor markers, (3,4) Escherichia coli, (5) viruses, (6,7) and gas molecules. (8)(9)(10)(11)(12)(13) It is expected that the parallel detection of different molecules would allow for prompt verification with such sensors. (2,8,9) A MEMS-based sensor featuring a system for detecting a static deflection of the dynamic system and a micromechanical structure to detect changes in mechanical resonance frequency has been proposed.…”

Section: Introductionmentioning

confidence: 99%

Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection

Maruyama¹,

Choi²,

Takahashi³

et al. 2019

Sensors and Materials

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Herein, we report an improved minimum detectable displacement on a surface stress biosensor using optical interferometry, allowing for the detection of a low biomarker concentration via antigen-antibody reaction. The sensor is composed of a submicronthick freestanding polymethyl methacr ylate (PMMA)/par ylene-C membrane on a polydimethylsiloxane (PDMS) substrate with a microcavity to generate optical interference. The cavity structure was fabricated by transferring the submicron-thick bilayer to the highly adhesive PDMS substrate. The detection of human serum albumin antigen at a concentration of 1 pg/mL was achieved by antigen-antibody reaction using simultaneous optical and electrical measurements. In addition, the minimum detectable displacement of the optical interferometric surface stress sensor was determined to be 42.6 pm, representing an 11.7-fold improvement compared with conventional cantilever-based surface stress sensors.

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Volatile detection system using piezoelectric micromechanical resonators interfaced by an oscillator readout

Cited by 23 publications

References 15 publications

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

Impact of Fluid Flow on CMOS-MEMS Resonators Oriented to Gas Sensing

An energy-efficient readout circuit for resonant sensors based on ring-down measurement

Improvement of Detection Limit of Nanomechanical Deflection Using Optical Interferometry for Label-free Molecular Detection

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