“…However, the bombardment effects have not been confirmed experimentally, and the mechanism by which the rutile or anatase TiO 2 phase grows during the sputtering process remains unknown. In the case of impurity doping, elements such as Mn [7], Fe [7], Cu [7], Ag [8], Ni [9] and Co [9] have been reported to enhance the phase transition from the anatase to the rutile phase, whereas other elements such as W [7], V [10], Si [11], Nb [12], Ta [12] and Cr [13] have been reported to suppress the anatase-to-rutile phase transition. On the basis of first-principles calculations, the room-temperature phase conversion of anatase to rutile TiO 2 using Co or Ni doping is attributed to the increased interaction between Co and Ni atoms, which results in the formation of a linear chain in the rutile phase [14].…”