Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

He, Bang-Quan; Yang, Yoon Mee; Yuen, Muk-Fung; Chen, Xianfeng; Lee, Chun‐Sing; Zhang, Wenjun

doi:10.1016/j.nantod.2013.04.008

Cited by 88 publications

(57 citation statements)

References 192 publications

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“…Cicada wing features have been reported as displaying a nanopillar morphology; 11,18 however, careful observation by a scanning electron microscopy (SEM) shows that they more closely resemble nanocone structures, since the base of the structure is wider than its tip. 19,20 Previous work by Chong 21 and Yang 22,23 has demonstrated fabrication of arrays of high-aspect-ratio diamond nanocones and nanoneedles. These nanocone arrays were found to mechanically puncture mouse MC3T3-E1 preosteoblast cells, which aided the delivery of molecules into the cells.…”

Section: à2mentioning

confidence: 99%

Bactericidal activity of biomimetic diamond nanocone surfaces

Fisher

Yang²,

Yuen³

et al. 2016

Biointerphases

118

105

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The formation of biofilms on implant surfaces and the subsequent development of medical device-associated infections are difficult to resolve and can cause considerable morbidity to the patient. Over the past decade, there has been growing recognition that physical cues, such as surface topography, can regulate biological responses and possess bactericidal activity. In this study, diamond nanocone-patterned surfaces, representing biomimetic analogs of the naturally bactericidal cicada fly wing, were fabricated using microwave plasma chemical vapor deposition, followed by bias-assisted reactive ion etching. Two structurally distinct nanocone surfaces were produced, characterized, and the bactericidal ability examined. The sharp diamond nanocone features were found to have bactericidal capabilities with the surface possessing the more varying cone dimension, nonuniform array, and decreased density, showing enhanced bactericidal ability over the more uniform, highly dense nanocone surface. Future research will focus on using the fabrication process to tailor surface nanotopographies on clinically relevant materials that promote both effective killing of a broader range of microorganisms and the desired mammalian cell response. This study serves to introduce a technology that may launch a new and innovative direction in the design of biomaterials with capacity to reduce the risk of medical device-associated infections.

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Section: à2mentioning

confidence: 99%

Bactericidal activity of biomimetic diamond nanocone surfaces

Fisher

Yang²,

Yuen³

et al. 2016

Biointerphases

118

105

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show abstract

“…22,27,28 Diamond, due to its high mechanical toughness, ensures the mechanical strength of nanoneedles with nanometer scale. Additionally, diamond is chemically inert and biocompatible, features allowing its safe application to cells.…”

Section: In Vitro Applicationsmentioning

confidence: 99%

Physical Delivery of Macromolecules using High-Aspect Ratio Nanostructured Materials

Lee¹,

Lingampalli²,

Pisano

et al. 2015

ACS Appl. Mater. Interfaces

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There is great need for the development of an efficient delivery method of macromolecules, including nucleic acids, proteins, and peptides, to cell cytoplasm without eliciting toxicity or changing cell behavior. High-aspect ratio nanomaterials have addressed many challenges present in conventional methods, such as cell membrane passage and endosomal degradation, and have shown the feasibility of efficient high-throughput macromolecule delivery with minimal perturbation of cells. This review describes the recent advances of in vitro and in vivo physical macromolecule delivery with high-aspect ratio nanostructured materials and summarizes the synthesis methods, material properties, relevant applications, and various potential directions.

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“…Silicon-based nanostructures including Si and SiO 2 are of great technological importance and considerable interest, and they have been extensively exploited for a wide variety of scientific and engineering applications ranging from attractive plasmonic [1, 2], sensitive biosensor devices [3, 4], phonics crystals to magnetic storage media [5, 6] and are also the building blocks for a broad range of nanoelectronic devices such as MOSFET [7, 8], nanofluidics [9, 10], and optoelectronics devices [11, 12]. Accordingly, there have been a large number of fabrication techniques and methods to produce highly controlled silicon-based nanostructures using top-down or bottom-up patterning strategies in the literatures [13–15].…”

Section: Introductionmentioning

confidence: 99%

A Novel Nanofabrication Technique of Silicon-Based Nanostructures

Meng

Gao

et al. 2016

Nanoscale Res Lett

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A novel nanofabrication technique which can produce highly controlled silicon-based nanostructures in wafer scale has been proposed using a simple amorphous silicon (α-Si) material as an etch mask. SiO2 nanostructures directly fabricated can serve as nanotemplates to transfer into the underlying substrates such as silicon, germanium, transistor gate, or other dielectric materials to form electrically functional nanostructures and devices. In this paper, two typical silicon-based nanostructures such as nanoline and nanofin have been successfully fabricated by this technique, demonstrating excellent etch performance. In addition, silicon nanostructures fabricated above can be further trimmed to less than 10 nm by combing with assisted post-treatment methods. The novel nanofabrication technique will be expected a new emerging technology with low process complexity and good compatibility with existing silicon integrated circuit and is an important step towards the easy fabrication of a wide variety of nanoelectronics, biosensors, and optoelectronic devices.

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Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

Cited by 88 publications

References 192 publications

Bactericidal activity of biomimetic diamond nanocone surfaces

Bactericidal activity of biomimetic diamond nanocone surfaces

Physical Delivery of Macromolecules using High-Aspect Ratio Nanostructured Materials

A Novel Nanofabrication Technique of Silicon-Based Nanostructures

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