The recent discovery of ferroelectricity in doped HfO2 has opened perspectives on the development of memristors
based on
ferroelectric switching, including ferroelectric tunnel junctions.
In these devices, conductive channels are formed in a similar manner
to junctions based on nonferroelectric oxides. The formation of the
conductive channels does not preclude the presence of ferroelectric
switching, but little is known about the device ferroelectric properties
after conduction path formation or their impact on the electric modulation
of the resistance state. Here, we show that ferroelectricity and related
sizable electroresistance are observed in pristine 4.6 nm epitaxial
Hf0.5Zr0.5O2 (HZO) tunnel junctions
grown on Si. After a soft breakdown induced by the application of
suitable voltage, the resistance decreases by about five orders of
magnitude, but signatures of ferroelectricity and electroresistance
are still observed. Impedance spectroscopy allows us to conclude that
the effective ferroelectric device area after the breakdown is reduced,
most likely by the formation of conducting paths at the edge.