1991
DOI: 10.1063/1.105818
|View full text |Cite
|
Sign up to set email alerts
|

Unintentional hydrogen concentration in liquid encapsulation Czochralski grown III–V compounds

Abstract: Articles you may be interested inPhotoluminescence and secondary ion mass spectrometry investigation of unintentional doping in epitaxial germanium thin films grown on III-V compound by metal-organic chemical vapor deposition

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

2
14
0

Year Published

1992
1992
2011
2011

Publication Types

Select...
8
1

Relationship

0
9

Authors

Journals

citations
Cited by 26 publications
(16 citation statements)
references
References 18 publications
2
14
0
Order By: Relevance
“…There is a strong absorption peak at 2350 cm −1 , which has been shown to be due to the local vibration mode ͑LVM͒ of hydrogen and indium vacancy complex V In H 4 . 38,39 The Fe doping of almost the same concentration compensates the residual free electrons that are present even in the best quality InP. 12,33 The V In H 4 defect is the main shallow donor responsible for the n-type conductivity of as grown undoped InP.…”
Section: Ftir Resultsmentioning
confidence: 99%
“…There is a strong absorption peak at 2350 cm −1 , which has been shown to be due to the local vibration mode ͑LVM͒ of hydrogen and indium vacancy complex V In H 4 . 38,39 The Fe doping of almost the same concentration compensates the residual free electrons that are present even in the best quality InP. 12,33 The V In H 4 defect is the main shallow donor responsible for the n-type conductivity of as grown undoped InP.…”
Section: Ftir Resultsmentioning
confidence: 99%
“…Previous work has shown that unintentional hydrogen contamination in these samples can be high (ϳ10 16 cm Ϫ3 ), 16 and this may well come from the high water content in B 2 O 3 . 17 The electron concentration and mobility of these samples are around 3ϫ10 15 cm Ϫ3 and 3000 cm 2 /v s, respectively. The annealing of these wafers was carried out in a sealed quartz tube which had been cleaned and evacuated.…”
Section: ͓S0021-8979͑99͒07616-1͔mentioning
confidence: 90%
“…Some acceptor impurity hydrogen complexes have also been found in as-grown LEC InP. 17 These can also increase the acceptor concentration by thermal decomposition. However, the second conversion into n type for our samples indicates that donor defects have been formed most likely by phosphorus atoms occupying indium vacancies.…”
Section: ͓S0021-8979͑99͒07616-1͔mentioning
confidence: 99%
“…The weak absorption peak of sample B-N-01 indicates that the concentration of this defect in this particular sample is low. The concentration of V In H 4 , estimated by the calibration data of the Zn-H complex in InP, 24,25 is in the range of 10 15 -10 16 cm Ϫ3 . In sample B-N-01 it is at least five times smaller.…”
Section: B Optical Measurementsmentioning
confidence: 99%