The electrical transport properties of n‐InxGa1–xN heterojunctions with Si(111) were investigated. InGaN films were grown by molecular beam epitaxy and either an AlN or Si3N4 buffer layer was used. For x in the range of 15‐45%, an ohmic junction is obtained with p‐type Si and a rectifying junction is formed with n‐type Si. The n‐InGaN/n‐Si heterojunction device functions as a solar cell. The series resistance is lower and the power conversion efficiency is higher for InGaN devices grown with an AlN buffer layer. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)