Progress over the past two decades has made it possible to study atomic-scale femtosecond molecular dynamics in all phases of matter. The atomic-scale spatial resolution has been achieved with both X-ray and electron diffraction, and only recently has the combination of spatial and temporal resolution [1] been advanced successfully for studies of isolated chemical reactions by ultrafast electron diffraction [2,3] and bulk crystal phonons and melting [4][5][6][7][8][9][10][11][12] by X-ray diffraction. For surface structures and molecules on surfaces, ultrafast electron crystallography (UEC) is unique, and herein we demonstrate its potential for the direct determination of surface structural dynamics of crystalline solids (GaAs), following impulsive fs laser excitation. From the change of Bragg diffraction (shift, width, and intensity), we show, by direct inversion of the diffraction data, that compression and expansion of the atoms occur on the À 0.01 to +0.02 scale, respectively, and that the transient temperature reaches its maximum value (1565 K) in 7 ps. The onset of structural change lags behind the rise in the temperature, demonstrating the evolution of non-equilibrium structures. These structural dynamics results are compared with those of nonthermal fs optical probing, and the agreement for the temperature response from the fluence dependence of the dielectric function is impressive. [13,14] The success in the direct observation of surface (monolayers) structural dynamics with combined ultrafast temporal and atomic-scale spatial resolutions promises many new applications of UEC.GaAs is an ideal system to demonstrate this potential of UEC for surface studies, especially as its crystalline and semiconducting properties are well-quantified.[15] This has allowed a wide range of ultrafast optical experiments that vary from the probing of carrier properties [16] to electronic disordering or change in symmetry.[17] In addition to these optical studies, recent ultrafast X-ray experiments on GaAs revealed bulk lattice dynamics following fs laser excitation. [8] However, these ultrafast X-ray experiments could not probe the surface owing to the large penetration depth into the crystal by X-rays, typically up to several mm. On the other hand, optical techniques that probed the surface on the scale of a few nanometers could not directly determine the structure with atomic-scale resolution, but gave valuable information on the response of the dielectric function and lattice disordering. [13,14,17] The large scattering cross-section of electrons combined with ultrafast time resolution allows the bridging of this gap in addressing the dynamics of surface structures in real time.The experiments were performed in the newly developed UEC apparatus, [18] briefly as follows (Figure 1). Under ultrahigh vacuum (10 À10 Torr), and following surface characterization by low-energy electron diffraction and Auger spectroscopy, the sample was brought to the scattering position where beams of the laser-pulse excitation and electron-pu...