“…MOS (metal oxide semiconductor) sensors which are surface-modified with different sensitive materials can detect different gases [ 3 , 4 , 5 , 6 , 7 , 8 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 ], such as carbon monoxide, sulfur dioxide, hydrogen sulfide, ammonia, and so on. Therefore, MOS sensors have become important environmental gas detectors and have attracted the attention of many researchers.…”