Two-Dimensional Theoretical Modeling and Experimental Investigations of Micromachined Thermal Expansion-Based Angular Motion Sensor

Luo, Huahuang; Wang, Xiaoyi; Duan, Mingzheng; Cabot, José; Lee, Yi-Kuen

doi:10.1109/jmems.2020.3045494

Cited by 6 publications

(1 citation statement)

References 30 publications

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“…Poly-silicon heater, commonly used as a thermal actuator for a variety of physical sensors [33]- [36], is employed as a heating source and implemented on the CMOS chip. The width of each heater is designed to be 10 um, and the total length is 3900 um to enclose the sensor array.…”

Section: Heating Regulationmentioning

confidence: 99%

A Highly Integrated Lab-on-a-CMOS Platform for Real-Time Monitoring of E. Coli Growth Kinetics

Duan,

Zhong,

Wang

et al. 2024

IEEE Trans. Biomed. Circuits Syst.

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Existing miniaturized and cost-effective solutions for bacterial growth monitoring usually require offline incubators with constant temperature to culture the bio-samples prior to measurement. Such a separated sample preparation and detection scheme requires extensive human intervention, risks contamination, and suffers from poor temporal resolution. To achieve integrated sample preparation and real-time bacterial growth monitoring, this paper presents a lab-on-a-CMOS platform incorporates an optical sensor array, temperature sensor array, micro-heaters, and readout circuits. Escherichia coli's (E. coli) optimum growth temperature of 37 • C is achieved through a heat regulation system consisting of two microheaters and an on-chip temperature sensor array. A photodiode array with an in-pixel capacitive trans-impedance amplifier to reduce inter-pixel cross-coupling is designed to extract the optical information during bacterial growth. To balance the footprint, power consumption, and quantization speed, a 10bit column successive-approximation register (SAR)/single-slope (SS) dualmode analog-to-digital converter (ADC) is designed to digitize the temperature and optical signals. Fabricated in a standard 0.18 um CMOS process, the proposed platform can regulate the sample temperature to 37 +/-0.2/0.3 • C within 32 mins. Enabled by an on-chip heat regulation system and photodetectors, the prototype demonstrates a real-time monitoring of bacterial growth kinetics and antibiotic responses. Minute-level temporal resolution is achieved as this proposed platform is free of extensive and time-consuming human intervention. The proposed platform can be viably used in contamination sensitive applications such as antibiotic tests, stem cell cultures, and organ-on-chips.

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Section: Heating Regulationmentioning

confidence: 99%