building blocks for numerous applications in diodes, transistors, photodetectors, and solar cells. [5][6][7][8][9] In addition, the charge transfer originating from the thermionic emission or quantum tunneling is affected by the band bending near the heterojunction, which relies on the Fermi level difference between materials.Previously, carrier transport properties through a heterojunction appear to be in principle material-dependent behaviors. Recent reports show the possibility to integrate multiple functions in a certain vdW heterostructure; for example, black phosphorus (BP) of different thicknesses are employed to provide a tunable Fermi level for the desired band bending. [10,11] Nevertheless, BP suffers from sensitivity in air. [12] Besides, the use of mechanically exfoliated BP is not tenable for controlling the exact flake thickness, which directly determines its Fermi level, let alone realize accessible integration. Chemical vapor deposition (CVD) technique is a promising approach in a wafer-scale synthesis for industrial applications. Moreover, introducing the dopant during CVD growth is an effective way to change the carrier density in the material and thus modulate the position of the Fermi level. [13] Here, we report a reliable and repeatable method to synthesize vanadium (V) substituted WSe 2 monolayer by CVD and demonstrate multifunctional p-n diode behaviors in V-doped WSe 2 /SnSe 2 heterostructures. A liquid precursor with tungsten host and vanadium dopant atoms is adopted in our approach with only two zones for the precise control of V-doping concentration in WSe 2 . The coverage of the grown-WSe 2 flakes is increased up to 90% at a high liquid precursor concentration ( Figure S1, Supporting Information). In addition to the p-type V-doped WSe 2 monolayer, multilayer SnSe 2 as an n-type material is introduced to construct the p-n junction. We observe the diverse p-n diode behaviors in V-WSe 2 /SnSe 2 devices with various V-doping concentrations at room temperature, including quantum tunneling p-n diodes for the forward rectification, backward rectification, negative differential resistance (NDR), and ohmic resistance. Figure 1a,b is the schematics for synthesizing V-doped WSe 2 monolayer with the CVD approach. Liquid precursor containing solutions of ammonium metatungstate (AMT: W-precursor) and ammonium metavanadate (AMV: V-precursor) together with a promoter of alkali metal (NaOH) and iodixanol is spin-casted on SiO 2 /Si substrate and then introduced into a two-zone furnace CVD for the selenization 2D van der Waals layered heterostructures allow for a variety of energy band offsets, which help in developing valuable multifunctional devices. However, p-n diodes, which are typical and versatile, are still limited by the material choice due to the fixed band structures. Here, the vanadium dopant concentration is modulated in monolayer WSe 2 via chemical vapor deposition to demonstrate tunable multifunctional quantum tunneling diodes by vertically stacking SnSe 2 layers at room temperature. This...