2011 IEEE International Conference on Mechatronics and Automation 2011
DOI: 10.1109/icma.2011.5985750
|View full text |Cite
|
Sign up to set email alerts
|

Translational offset detection based on far-field intensity for grating tiling

Abstract: The far-field intensity is detected from far-field image to estimate the piston distance between two gratings. The image processing algorithm includes projections along the horizontal and vertical directions, search for each focal spot's centre, feature extraction and intensity computation. Each focal spot's centre can be found with the projections. A self-growing method is used for feature extraction, where the threshold value depends on the gray value of each focal spot's centre. For each focal spot, the sum… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2014
2014
2014
2014

Publication Types

Select...
1

Relationship

0
1

Authors

Journals

citations
Cited by 1 publication
(1 citation statement)
references
References 14 publications
0
1
0
Order By: Relevance
“…Thus, mapping formulation needs to be determined to map the energy ratio in the image space to the piston in the Cartesian space [21]. To do so, step movement in the piston direction was activated manually, and the corresponding energy ratio was computed.…”
Section: ) Mapping Formulation Determination In the Piston Controlmentioning
confidence: 99%
“…Thus, mapping formulation needs to be determined to map the energy ratio in the image space to the piston in the Cartesian space [21]. To do so, step movement in the piston direction was activated manually, and the corresponding energy ratio was computed.…”
Section: ) Mapping Formulation Determination In the Piston Controlmentioning
confidence: 99%