2013
DOI: 10.1016/j.carbon.2013.08.036
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Transfer-free growth of graphene on SiO2 insulator substrate from sputtered carbon and nickel films

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Cited by 63 publications
(40 citation statements)
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“…Since both methods require a transferring process, graphene growth methods that allow for direct formation on silicon substrates have been sought aer and several attempts have been reported. [27][28][29][30][31][32][33][34][35][36][37][38][39][40] In this study, we developed a procedure to grow graphene from a solid-state carbon source directly on silicon substrates. To reduce the complexity of the process, the number of steps, and the cost, we have also developed a direct patterning procedure that allows to produce graphene samples with arbitrary position, size, and shape: notably this procedure does not require any dry etching process.…”
Section: Introductionmentioning
confidence: 99%
“…Since both methods require a transferring process, graphene growth methods that allow for direct formation on silicon substrates have been sought aer and several attempts have been reported. [27][28][29][30][31][32][33][34][35][36][37][38][39][40] In this study, we developed a procedure to grow graphene from a solid-state carbon source directly on silicon substrates. To reduce the complexity of the process, the number of steps, and the cost, we have also developed a direct patterning procedure that allows to produce graphene samples with arbitrary position, size, and shape: notably this procedure does not require any dry etching process.…”
Section: Introductionmentioning
confidence: 99%
“…Actually, an often adopted approach to synthesize graphene on dielectric substrates is to prepare graphene layers by chemical vapor deposition exploiting metal films catalysts (such as Cu, Ni, Ru, or Co), with successive transfer of these layers on the insulating dielectric. Synthesis of few graphene layers on SiO2 has been obtained by means of transfer‐free and catalysts‐free procedures.…”
Section: Introductionmentioning
confidence: 99%
“…[14][15][16][17] Although most of these processes inevitably require substrate transfer procedures, some useful ideas on transfer-free techniques have been suggested. [18][19][20][21][22][23][24][25][26][27][28] To consider real-world applications of graphene, the development of practicable transfer-free processes will be very important. Recently, we reported that multilayered graphene films can be formed directly on insulating SiO 2 /Si substrates by employing a thin metal film as an underlying catalyst film.…”
mentioning
confidence: 99%