Toxic gas response of (ln,Sn)O/sub 2//Pt nanowire sensors

Abstract

Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C3HgO3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH,CN) as a simulant gas for blood gas. Sensing materiais are Pt/Sn02, where Pt layer (30 A) is deposited on tin oxide film grown on alumina substrate, ( Sn,In)02/Pt and SnO,/Pt, where (Sn,In)02 and tin oxide films are deposited on Pt layer (30 A) grown on aluminasubstrate, respectively. In the latter two sample have a nano-wire structurc growl1 over thin film. The thickness of nano-wire is -60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH3CN. We display the results compared that of nano-wire with ordinary tin oxide sample.