Tool-based Micro Machining and Applications in MEMS

Liu, K.; Lim, Gwon

doi:10.1007/0-387-25786-1_18

Cited by 22 publications

(17 citation statements)

References 93 publications

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“…Nonconventional micromachining technology such as microturning, microgrinding, micro electro-discharge machining (micro-EDM), and microelectrochemical machining (ECM) have many advantages in productivity, efficiency, flexibility, and cost effectiveness; consequently, these nonconventional methods have been applied to a variety of substrates and materials to fabricate microstructures (6,(11)(12)(13)(14). Among the nonconventional micromachining techniques, micro-EDM has provided an efficient solution for machining hard conductive materials and fabricating complex cross-sectional structures.…”

Section: Introductionmentioning

confidence: 99%

Microelectrochemical Deposition

Habib¹

2014

Comprehensive Materials Processing

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Section: Introductionmentioning

confidence: 99%

Microelectrochemical Deposition

Habib¹

2014

Comprehensive Materials Processing

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“…Recently ultra-precision micro patterns and shapes are widely used in a number of industrial fields [1]. Various processes based on semi-conductor processing techniques are used in fabrication of micro shapes and patterns, however mechanical cutting method has lately attracted considerable attention because of various available materials, flexibility of process and high-productivity.…”

Section: Introductionmentioning

confidence: 99%

Prediction of Cutting Force and Tool Deflection in Micro Flat End Milling

Gye¹,

Song²,

Lim³

et al. 2013

IJMMM

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Abstract-This paper presents an investigation of prediction of cutting force and tool deflection in micro flat end milling. To predict cutting forces specific cutting force coefficients KT and KR were used. In fact, various cutting forces prediction models were proposed in past researches for conventional sized machining processes. However, micro end-milling processes were known as different phenomenon as respect to macro end-milling. Many past researches concerned complicated different models for micro end-milling from macro end-milling. However, cutting force models for both macro and micro end milling were fundamentally based on measured cutting forces for a series of experimental machining processes. Then, cutting force model proposed by Tlusty, which was developed for macro end-milling, was applied for micro flat end milling because this model is relatively simple. Finite element method was used to predict tool deflection based on predicted cutting forces. Predicted tool deflection amounts and actual machined profiles were compared each other in order to check out the differences between them.Index Terms-Cutting force, micro end-mill, finite element method, tool deflection.

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“…Tool-based micromachining methods such as microturning, micromilling, and microgrinding are capable of generating 3D free-form features with micron level accuracy. Despite its potential, practical use of mechanical microcutting is limited by the low tool/machine stiffness and cutting tool strength, especially for hard materials such as heat-treated mold, die steels, and ceramics [7,8]. One solution to this problem is to employ nontraditional machining techniques which are also being developed in microscopic scale in order to achieve real 3D sculptured complex components.…”

Section: Introductionmentioning

confidence: 99%

Recent Developments and Research Issues in Microultrasonic Machining

Jain

Sharma

Kumar

2011

ISRN Mechanical Engineering

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Demand for micromachining has been on the rise in recent years owing to increasing miniaturization. Production of parts in microscale, especially with brittle materials, is challenging. Ultrasonic micromachining has been gaining popularity as a new alternative in fabrication of such parts. The process gives a machining option for geometrically challenging and/or brittle material parts that are difficult to machine by conventional processes. In the recent years, possibilities have been explored to improve the “Unit Removal” in microultrasonic machining (micro-USM). However, the research in the area is yet to attain momentum. The present paper is an attempt to present the state of the art in the area of micro-USM based on the literature. Developments in the critical areas of the process like machine tool technology, machining tool head, transducers, and precision attainable in the process with challenges have been discussed. Potential research issues have been explored for future work. Possible application areas have been identified.

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Tool-based Micro Machining and Applications in MEMS

Cited by 22 publications

References 93 publications

Microelectrochemical Deposition

Microelectrochemical Deposition

Prediction of Cutting Force and Tool Deflection in Micro Flat End Milling

Recent Developments and Research Issues in Microultrasonic Machining

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