TiO2 thin films as sensing gas materials

Hydrogen Gas Sensing Properties of AgNPs-Doped Titania Nanotubes by Electroless Deposition

“…In recent years a large number of contributions have reported the extraordinary sensitivity of TiO 2 towards H 2 [14] . TiO 2 also shows good sensing properties to CO [15] , ethanol [16] , methane [17] , etc. and have an advantage of being chemically stable at high temperatures which makes it a good candidate for gas sensing applications [18] .…”

Influence of the substrate on the overall sensor impedance of planar H<sub>2</sub> sensors involving TiO<sub>2</sub>–SnO<sub>2</sub> interfaces

“…If at all, the substrate is only treated as a thermally important component (Simon et al, 2001). Rarely is it discussed with a focus on other aspects, like the influence of the substrate on the growth of the crystalline phases (Mardare et al, 2008). However, the substrate could play a decisive role in the overall impedance of the sensor system (Fischerauer et al, 2009).…”

Structure and H2 Sensing Property of TiO2 Sputtered Films Deposited under Various Discharge Gas Pressures

“…Various oxide semiconductor films such as SnO 2 , (1)(2)(3)(4)(5) WO 3 , (6)(7)(8)(9) TiO 2 , (10)(11)(12)(13)(14)(15)(16)(17)(18)(19)(20)(21)(22) MoO 3 , (23,24) NiO, (25,26) In 2 O 3 , (27,28) and ZnO (29,30) have been studied as gas-sensing materials and they demonstrated good sensing properties for detecting target gases such as NO x , O 3 , NH 3 , CO, H 2 , H 2 S, and CH 4 . Of these oxide semiconductor films, TiO 2 , an n-type semiconductor, has recently attracted much attention because of its high durability, high chemical stability in hostile environments, and thermal stability at high temperature.…”

“…Of these oxide semiconductor films, TiO 2 , an n-type semiconductor, has recently attracted much attention because of its high durability, high chemical stability in hostile environments, and thermal stability at high temperature. (12) TiO 2 films have been formed by methods such as sputtering, (10)(11)(12)(13)(14)(15) thermal oxidation, (16) microarc oxidation, (17) anode oxidation, (18) dip coating, (19) sol-gel method, (20,21) and spray pyrolysis, (22) and they have been studied as gas-sensing materials. For example, a macroporous TiO 2 film deposited by radio frequency (RF) sputtering on a polymethacrylate-microsphere templated substrate showed a high sensitivity to NO 2 .…”

“…The sensitivity increased as the film density decreased, that is, a porous film showed a high sensitivity. Although there have been some reports of gas sensors made of TiO 2 sputtered films, (10)(11)(12)(13)(14)(15) no systematic investigation of the gas sensing property of the films deposited under various discharge gas pressures in relationship to the film structure has been reported. Thus, in this study, we investigated the effect of discharge gas pressures on the TiO 2 film structure and discussed the relationship between the film structure and H 2 sensing property.…”