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“…В мировой практике современной мик роэ ле к т р он и к и оп т и че с к а я с к ат т е р оме т ри я используется в качестве стандартного метода к он т р о л я п р оц е с с ов ф о рм и р ов а н и я т р е хмерных ст рукту р. В частности, скаттеромет ри я а к т и вно п ри ме н яе т с я д л я кон т р ол я the world practice, the scatterometry has become widely used in the transition to small design rules [19,21], since it allows the replacement of several traditional means of control, and also has high performance and accuracy [20]. The technique is successfully applied at technological levels up to 20 nm [20,21], and the effect of the roughness of the element boundaries on the result has been studied [18,22] and can be taken into account. However, the successful introdu c t ion of s c at te romet r y i n each technological case requires a comprehensive study of the structure by cross methods.…”
Section: Control Of Lateral Sizes Of Formed Elementsmentioning
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rupbmjkragerfmgwileyiopcupepmcmbcthiemesagefrontiersapsiucrarxivemeralduhksmucshluniversity-of-gavle
“…В мировой практике современной мик роэ ле к т р он и к и оп т и че с к а я с к ат т е р оме т ри я используется в качестве стандартного метода к он т р о л я п р оц е с с ов ф о рм и р ов а н и я т р е хмерных ст рукту р. В частности, скаттеромет ри я а к т и вно п ри ме н яе т с я д л я кон т р ол я the world practice, the scatterometry has become widely used in the transition to small design rules [19,21], since it allows the replacement of several traditional means of control, and also has high performance and accuracy [20]. The technique is successfully applied at technological levels up to 20 nm [20,21], and the effect of the roughness of the element boundaries on the result has been studied [18,22] and can be taken into account. However, the successful introdu c t ion of s c at te romet r y i n each technological case requires a comprehensive study of the structure by cross methods.…”
Section: Control Of Lateral Sizes Of Formed Elementsmentioning
“…При этом возможно не только измерение латеральных размеров периодических структур, но одновременно и глубины канавок травления, наклона их стенок. В мировой практике скаттерометрия получила широкое распространение при переходе на малые топологические нормы [19,21], так как позволяет заменить сразу несколько тра диционных средств контроля, а так же обла дает высокой производительностью и точностью [20]. Методика успешно применяется на технологических уровнях вплоть до 20 нм [20,21], причем влияние шероховатостей границ элементов на результат изучено [18,22] и может быть учтено.…”
Section: Control Of Lateral Sizes Of Formed Elementsunclassified