2011
DOI: 10.1117/12.881190
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Three-dimensional structuring inside transparent materials by a phase modulated fs laser beam with a LCOS-SLM

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Cited by 4 publications
(1 citation statement)
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“…One of the critical problems in industrial application of fs laser processing is the processing efficiency. One method to improve the processing efficiency is a parallel laser processing with a spatial light modulator (SLM) [4][5][6][7][8][9][10] . In the parallel laser processing, multiple light spots are generated by modulating of the spatial phase distribution of a laser beam with an SLM and focusing the phase modulated laser beam.…”
Section: Introductionmentioning
confidence: 99%
“…One of the critical problems in industrial application of fs laser processing is the processing efficiency. One method to improve the processing efficiency is a parallel laser processing with a spatial light modulator (SLM) [4][5][6][7][8][9][10] . In the parallel laser processing, multiple light spots are generated by modulating of the spatial phase distribution of a laser beam with an SLM and focusing the phase modulated laser beam.…”
Section: Introductionmentioning
confidence: 99%