Three-dimensional space charge cartographies by FLIMM in electron irradiated polymers

Petre, Anca; Pham, Congduc; Marty-Dessus, Didier; Berquez, Laurent

doi:10.1016/j.elstat.2008.12.011

Cited by 16 publications

(8 citation statements)

References 18 publications

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“…The LIMM technique [2][3][4][5] uses a modulated intensity laser diode ( mW 45 , nm 658 ), which can be focused on the sample through a Nachet lens leading to a spot size smaller than 10μm. The working frequencies range between 105 Hz to 10 kHz.…”

Section: A Flimm Methodsmentioning

confidence: 99%

Space charge distribution detection by FLIMM and PEA method on electron beam irradiated dielectric films

Pham

Griseri

Berquez

2009

2009 IEEE Conference on Electrical Insulation and Dielectric Phenomena

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Space charge distribution in polymeric films after an electronic irradiation depends on the energy, the flux of the beam but also on the material intrinsic properties, its thickness etc. In order to get a better understanding of the charge storage, transport and extraction, it is necessary to compare the results obtained by various tools. In this preliminary work, dielectric films of various thickness were irradiated in vacuum by an electron beam then the space charge profile was recorded by two methods : the Focussed Laser Modulated Method (FLIMM) and the Pulse Electro-Acoustic (PEA) technique.

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Section: A Flimm Methodsmentioning

confidence: 99%

Space charge distribution detection by FLIMM and PEA method on electron beam irradiated dielectric films

Pham

Griseri

Berquez

2009

2009 IEEE Conference on Electrical Insulation and Dielectric Phenomena

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“…[36][37][38][39][40][41][42] The first results showed that non-contacting measurements were possible, provided that significant currents can be extracted from noise. In this case, they are representative of an internal space charge (or polarization) in the sample that can be calculated by mathematical inversion of the electrostatic problem.…”

Section: B Application: 2-d and 3-d Cartographiesmentioning

confidence: 99%

Space charge distributions in insulating polymers: A new non-contacting way of measurement

Marty-Dessus

Ziani

Petre

et al. 2015

Review of Scientific Instruments

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A new technique for the determination of space charge profiles in insulating polymers is proposed. Based on the evolution of an existing thermal wave technique called Focused Laser Intensity Modulation Method ((F)LIMM), it allows non-contact measurements on thin films exhibiting an internal charge to be studied. An electrostatic model taking into account the new sample-cell geometry proposed was first developed. It has been shown, in particular, that it was theoretically possible to calculate the internal charge from experimental measurements while allowing an evaluation of the air layer appearing between the sample and the electrode when non-contact measurements are performed. These predictions were confirmed by an experimental implementation for two thin polymer samples (25 μm-polyvinylidenefluoride and 50 μm-polytetrafluoroethylene (PTFE)) used as tests. In these cases, minimum air-layer thickness was determined with an accuracy of 3% and 20%, respectively, depending on the signal-to-noise ratio during the experimental procedure. In order to illustrate the reachable possibilities of this technique, 2D and 3D cartographies of a negative space charge implanted by electron beam within the PTFE test sample were depicted: like in conventional (F)LIMM, a multidimensional representation of a selectively implanted charge remains possible at a few microns depth, but using a non-contacting way of measurement.

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“…Classical space charge probing methods [3] present generally no lateral resolution. Even though the focus light intensity modulation method (FLIMM) [4] allows 3D space charge probing, its lateral resolution, of few microns, is incompatible with investigation of physical mechanisms occurring close to the interface.…”

Section: Introductionmentioning

confidence: 99%

2D Charge Density Probing at Aluminum / SiNx Interface: a Sub-micrometric Investigation by Kelvin Probe Force Microscopy

Djaou

Villeneuve-Faure

Boudou

et al. 2020

2020 IEEE 3rd International Conference on Dielectrics (ICD)

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Charge injection and transport mechanisms occurring at metal/dielectric interface may strongly impact devices performance and reliability. However, these phenomena remain partially understood, mainly due to the lack of adapted characterization tools. In this paper, we propose an investigation of the charging behavior at the Al/SiN x interface using Kelvin Probe Force Microscopy (KPFM). Indeed, KPFM measurements permit to probe space charge density with a sub micrometric resolution. Results presented here emphasize that electrons and holes are injected and trapped close to cathode and anode, respectively. The charge clouds remain stacked to the interface (2-3µm). Moreover, the amount of injected charges increases with the applied bias. The injected electrons and holes follow the same dissipation mechanism in time after bias removal.

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Three-dimensional space charge cartographies by FLIMM in electron irradiated polymers

Cited by 16 publications

References 18 publications

Space charge distribution detection by FLIMM and PEA method on electron beam irradiated dielectric films

Space charge distribution detection by FLIMM and PEA method on electron beam irradiated dielectric films

Space charge distributions in insulating polymers: A new non-contacting way of measurement

2D Charge Density Probing at Aluminum / SiNx Interface: a Sub-micrometric Investigation by Kelvin Probe Force Microscopy

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