Thin film TiC/TaC thermocouples

Bhatt, H.D.; Vedula, Ramakrishna; Desu, Seshu B.; Fralick, Gustave C.

doi:10.1016/s0040-6090(98)00963-8

Cited by 64 publications

(22 citation statements)

References 16 publications

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“…4,5 Due to the limitations of platinum and platinum:rhodium thermocouples, several researchers have considered alternative materials for temperature measurement in harsh environments. Studies using TiC-TaC thin film thermocouples by Bhatt et al 6 yielded some promising results at temperatures as high as 1080°C however, these devices were limited to operation in inert atmospheres or under vacuum conditions. Devices based on MoSi 2 and TiSi 2 films have shown promise in air at temperatures as high as 1200°C.…”

Section: Introductionmentioning

confidence: 99%

Stability and Microstructure of Indium Tin Oxynitride Thin Films

et al. 2011

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Indium oxide (In2O3) and indium tin oxide (ITO) thin films have been investigated for high temperature thermocouple and strain guage applications. Reactive sputtering in nitrogen‐rich plasmas was used to improve the high temperature stability of indium oxide‐based films in air and scanning electron microscopy was used to follow the microstructural changes in the nitrogen‐processed films. When thermally cycled at temperatures above 800°C, a partially sintered microstructure comprised of nanometer‐sized crystallites was revealed. A densified layer was also formed on the surface, which acted as an oxygen‐diffusion barrier in the bulk film. This combined with a network of partially sintered oxynitride crystallites lead to considerable open porosity and a stabilizing effect on the ensuing electrical properties. In this article, the thermoelectric properties of nitrogen‐processed films were evaluated at temperatures up to 1400°C. To study the effect of nitrogen plasma processing on the sintering kinetics and associated densification, the constrained sintering of the resulting films was followed as a function of time and temperature. Based on the measured thermoelectric properties of the nitrogen processed films, drift rates on the same order of magnitude as commercial type K wire thermocouples were realized for these all‐ceramic thermocouples.

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Section: Introductionmentioning

confidence: 99%

Stability and Microstructure of Indium Tin Oxynitride Thin Films

et al. 2011

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“…According to DIN EN 60584, eight different thermocouple pairs are available, whereas Fe-CuNi [12], Cu-CuNi [13], NiCr-Ni [6][7][8][9] and Pt-10%Rh/Pt [14] are the most reported thin film thermocouples deposited by means of PVD. Apart from the standardized thermocouples, TiC-TaC [15], Al-Au [11], Ni-Cu [12,16], Ni-Fe [12], Cu-Fe [12], Chromel-Alumel [5,12], and Pt-Pd [4] thin film thermocouples are synthesized. On the other hand, depending on the application, the thin film thermocouples need to be protected against wear or oxidation processes by means of a suitable tribological cover layer.…”

Section: Introductionmentioning

confidence: 99%

Combining Thermal Spraying and Magnetron Sputtering for the Development of Ni/Ni-20Cr Thin Film Thermocouples for Plastic Flat Film Extrusion Processes

et al. 2019

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In the digitalization of production, temperature determination is playing an increasingly important role. Thermal spraying and magnetron sputtering were combined for the development of Ni/Ni-20Cr thin film thermocouples for plastic flat film extrusion processes. On the thermally sprayed insulation layer, AlN and BCN thin films were deposited and analyzed regarding their structural properties and the interaction between the plastic melt and the surfaces using Ball-on-Disc experiments and High-Pressure Capillary Rheometer. A modular tool, containing the deposited Ni/Ni-20Cr thin film thermocouple, was developed and analyzed in a real flat film extrusion process. When calibrating the thin film thermocouple, an accurate temperature determination of the flowing melt was achieved. Industrial type K sensors were used as reference. In addition, PP foils were produced without affecting the surface quality by using thin film thermocouples.

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“…In addition, the carbides and silicides of metals show high thermal‐resistant properties and metal‐like electrical properties that make them attractive for being used as sensing elements, while they can only be used in inert and reducing environments at high temperatures . According to a NASA's report, conductive oxides‐based thermocouples may be an ideal choice for temperature measurements in harsh environments such as air/oxygen . Several conductive oxide based‐thermocouples have been investigated, such as In 2 O 3 –ITO and ZnO:Al (AZO), but In 2 O 3 –ITO thermocouples with the reported best performance suffer from a serious volatilization problem above 1200°C, especially losing Sn 4+ from ITO .…”

Section: Introductionmentioning

confidence: 99%

“…16 According to a NASA's report, conductive oxides-based thermocouples may be an ideal choice for temperature measurements in harsh environments such as air/oxygen. 17 Several conductive oxide based-thermocouples have been investigated, such as In 2 O 3 -ITO 11 and ZnO:Al (AZO), 18 but In 2 O 3 -ITO thermocouples with the reported best performance suffer from a serious volatilization problem above 1200°C, especially losing Sn 4+ from ITO. 19 From our previous work, the La 0.8 Sr 0.2 CrO 3 -In 2 O 3 thick film thermocouple with giant thermoelectric voltage has been investigated, 20 which gives an inspiration that LaCrO 3 -based materials can be used as a promising candidate electrode of thermocouples for higher temperature due to its high melting points (about 2490°C).…”

Section: Introductionmentioning

confidence: 99%

Facile high‐performance film thermocouple made of strontium lanthanum chromate for temperature sensing in air

et al. 2018

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Film thermocouples as the most effective tool are used to monitor the real‐time and accurate in situ temperature in harsh environment, which will demand their electrodes with high thermal‐resistant properties, high sensitivity, and stability. In this work, a series of solid solutions based on strontium lanthanum chromate were systematically investigated as new electrodes. LaCrO3 and La0.8Sr0.2CrO3 with some glass additives were chosen to fabricate high‐performance thick‐film thermocouple due to a bigger Fermi level difference between them. The thermocouple shows a high sensitivity (107.8 μV/°C) during static calibration, and an excellent reproducibility and stability during multicycle calibrations carried out up to 1550°C, resulting in a record ultra‐high temperature sensing in film thermocouples. This facile thermocouple may open up a new way to measure high temperature in air or oxidation atmosphere accurately.

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Thin film TiC/TaC thermocouples

Cited by 64 publications

References 16 publications

Stability and Microstructure of Indium Tin Oxynitride Thin Films

Stability and Microstructure of Indium Tin Oxynitride Thin Films

Combining Thermal Spraying and Magnetron Sputtering for the Development of Ni/Ni-20Cr Thin Film Thermocouples for Plastic Flat Film Extrusion Processes

Facile high‐performance film thermocouple made of strontium lanthanum chromate for temperature sensing in air

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