Thin-film piezoelectric acoustic sensors. Application to the detection of hydrocarbons

Dorojkine, L.M.; Volkov, V. V.; Doroshenko, V. S.; Lavrenov, A.A.; Mourashov, D.A.; Rozanov, I. A.

doi:10.1016/s0925-4005(97)00260-8

Cited by 14 publications

(5 citation statements)

References 4 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The TFPAS design was described in detail elsewhere [8,9]. The sensor substrates were polished SiO 2 (fused) and YAG plates (1 1 1 cut) of 10 mm × 10 mm × 1.5 mm in size.…”

Section: Methodsmentioning

confidence: 99%

“…Because the acoustic wave sensors are relatively inexpensive, readily available, and can provide high sensitivity with real-time detection and identification, they have the potential to become the method of choice for sensors operating at or near ambient conditions. A while ago, a new type of acoustic sensor has been introduced that exploits the bulk longitudinal acoustic wave and has a complex resonator [8,9]. Its driving piezoelement was a thin piezoelectric film of several microns thickness that was deposited onto a non-piezoelectric substrate which played the role of a resonator cavity.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Thin-film piezoelectric acoustic sensor (TFPAS): further experimental validation of the theory of resonance sensitivity

Dorozhkin

Dorozhkina

Fokin

et al. 2005

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

“…The TFPAS design was described in detail elsewhere [8,9]. The sensor substrates were polished SiO 2 (fused) and YAG plates (1 1 1 cut) of 10 mm × 10 mm × 1.5 mm in size.…”

Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Thin-film piezoelectric acoustic sensor (TFPAS): further experimental validation of the theory of resonance sensitivity

Dorozhkin

Dorozhkina

Fokin

et al. 2005

Sensors and Actuators B: Chemical

View full text Add to dashboard Cite

“…Its driving piezoelement is a thin piezoelectric film, of several microns in size, deposited onto non-piezoelectric substrate, which plays a role of resonator cavity. For this reason we call it thin film piezoelectric acoustic sensor(TFPAS) [1].…”

Section: Introductionmentioning

confidence: 99%

A New Thin-Film Piezoelectric Sensor for Easuring Methane Gas

Tong

Liu

Tang

et al. 2012

AMR

View full text Add to dashboard Cite

To measure the concentration of CH4, we developed a thin film piezoelectric acoustic sensor (TFPAS), it accomplishes the detection of CH4 by the absorption of CH4 which can change the oscillation frequency of the piezoelectric crystal. The sensor is mainly composed by the piezoelectric film, sensitive film, silicon substrate and electrodes. The sensitive film is made up of nanometer-sized MgO scattered on pitch-based activated carbon fibers which has a strong adsorption of CH4. The piezoelectric film is a ZnO film which has very high piezoelectric characteristic parameters. The experimental results show that the sensitivity of the sensor to CH4 is very high. The response of the sensor to the presence of CH4 tested was found to be linear within a certain detection range and the detection error is less than 5%.

show abstract

“…Due to the simple structure, small size, light weight, and large deformation, the CPUAs and CPBAs, as two typical kinds of piezoelectric actuators based on the inverse piezoelectric effect of piezoelectric materials, have been widely used to develop electroacoustic transducers (Dorojkine et al, 1997;Zhang and Wang, 2002;Luan et al, 2004) and micro-fluidic transport (Li et al, 2004;Woias, 2005).…”

Section: Introductionmentioning

confidence: 99%

“…A CIRCULAR piezoelectric unimorph actuator (CPUA) consists of a polarized piezoelectric layer and a substrate layer, which are bonded to each other using the conducting epoxy as the bonding layer, while a circular piezoelectric bimorph actuator (CPBA) is made of two polarized piezoelectric layers and a substrate layer, and the polarized piezoelectric layers are axisymmetrically bonded to both sides of the substrate layer. Due to the simple structure, small size, light weight, and large deformation, the CPUAs and CPBAs, as two typical kinds of piezoelectric actuators based on the inverse piezoelectric effect of piezoelectric materials, have been widely used to develop electroacoustic transducers (Dorojkine et al, 1997;Zhang and Wang, 2002;Luan et al, 2004) and micro-fluidic transport (Li et al, 2004;Woias, 2005).…”

Section: Introductionmentioning

confidence: 99%

Modeling and Testing of the Static Deflections of Circular Piezoelectric Unimorph Actuators

Wang

Huo

2010

Journal of Intelligent Material Systems and Structures

View full text Add to dashboard Cite

In this article, based on the classical laminated plate theory, a new static deflection model for CPUAs subjected to voltage is established and the bonding layer is taken into account as an individual layer. According to the established analytical model, the influences of the structural parameters and material properties of the CPUA on the transverse deflection are numerically simulated and the static and dynamic characteristics of the CPUA are experimentally tested. The research results show that the predicted static deflections of the CPUA by the established deflection model in this article agree well with the measured results, the established static deflection model considering the bonding layer is more accurate than the existing model neglecting the bonding layer, and the maximum relative error is reduced by 8.45%. The static deflections of the CPUA are apparently affected by the structural parameters and the material properties, which indicate that the performance of the CPUA can be optimized by the structural parameters and material properties. Because the hysteresis of the piezoelectric material is not considered when establishing the static deflection model, the apparent error exists when utilizing the static deflection model to predict the dynamic characteristics of the CPUA.

show abstract

Thin-film piezoelectric acoustic sensors. Application to the detection of hydrocarbons

Cited by 14 publications

References 4 publications

Thin-film piezoelectric acoustic sensor (TFPAS): further experimental validation of the theory of resonance sensitivity

Thin-film piezoelectric acoustic sensor (TFPAS): further experimental validation of the theory of resonance sensitivity

A New Thin-Film Piezoelectric Sensor for Easuring Methane Gas

Modeling and Testing of the Static Deflections of Circular Piezoelectric Unimorph Actuators

Contact Info

Product

Resources

About