The coefficient of thermal expansion (CTE) for thin polymer films is a property of considerable practical importance. In contrast to the abundance of CTE data in the in‐plane or film direction, data in the thickness or z‐direction is rarely available, in part due to the high sensitivity required for measurement of the small thickness changes involved. In this paper, we will describe both a capacitance change and a Fabry‐Perot laser interferometric method for measuring z‐direction CTE's. Results are p…
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