In this letter we report on the effect of thickness scaling in model PbZr 0.2 Ti 0.8 O 3 ͑PZT͒ / SrRuO 3 heterostructures. Although theoretical models for thickness scaling have been widely reported, direct quantitative experimental data for ultrathin perovskite ͑Ͻ10 nm͒ films in the presence of real electrodes have still not been reported. In this letter we show a systematic quantitative experimental study of the thickness dependence of switched polarization in (001) epitaxial PZT films, 4 to 80 nm thick. A preliminary model based on a modified Landau Ginzburg approach suggests that the nature of the electrostatics at the ferroelectric-electrode interface plays a significant role in the scaling of ferroelectric thin films. The effect of thickness scaling in ferroelectrics has recently been of immense interest. [1][2][3][4][5][6][7][8][9][10][11][12] As the dimensions (both lateral and vertical direction) of the perovskite layer decreases, the fundamental question of size dependence becomes crucial. From a theoretical point of view, two models have been traditionally used to describe size effects, namely an "intrinsic" effect 9,10,13 and a "depoling field" effect. 4,5,14,15 Experimentally Tybell et al. 8 qualitatively showed that even a 4-nm-thick epitaxial PbZr 0.2 Ti 0.8 O 3 (PZT) film on Nb:STO is ferroelectric. However a direct experimental quantification of the ferroelectric polarization, particularly for films in the sub-10 nm thickness range has not been reported. For such ultrathin films direct experimental quantification of size effects are complicated by extrinsic effects such as leakage and therefore methods other than the traditional P -E hysteresis loop have been reported to characterize the stability of the polar state. 1,7 This letter presents experimental measurements of the switched polarization in PZT films of thickness down to 4 nm, in the presence of real electrodes.A 70-nm-thick SRO layer was grown on STO at 650°C followed by the PZT layer via pulsed laser deposition. The deposition was carried out at 100 mTorr of oxygen and the sample was cooled down from growth temperature 1 atm of oxygen. In order to avoid complications from 90°domain formation the PZT films were grown in a thickness range from 4 to 80 nm, for which they are entirely c-axis oriented. The switchable polarization was measured using a Radiant Technologies Precision Premier system at 16 kHz (hysteresis loops) and an AFM based pulsed probing technique with conductive Pt-Ir tips was employed to measure the pulsed polarization. 16 We focused on the PZT ͑0/20/80͒ composition, since it has an in-plane lattice parameter of 3.94 Å, 17 which is closely lattice matched to SRO͑3.93 Å͒. Figure 1(a) is a low magnification TEM image of a 4 nm (nominal) thick film; the interfaces between SRO and PZT are sharp, identified as dashed lines in the high resolution image, Fig. 1(b). The electrode-ferroelectric interface shows a significantly reduced dislocation density, attributed to the small lattice mismatch (0.7%) at growth temperature of 600...