2019
DOI: 10.1063/1.5116979
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Theoretical calculation for sputtering yield of beryllium copper alloy bombarded by Argon, nitrogen and oxygen ions

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“…Therefore, in terms of sputtering cleaning efficiency, argon as the working gas under the same conditions is more efficient. A similar situation was also mentioned in Naeem N's study [25].…”
Section: Cleaning Efficiencysupporting
confidence: 81%
“…Therefore, in terms of sputtering cleaning efficiency, argon as the working gas under the same conditions is more efficient. A similar situation was also mentioned in Naeem N's study [25].…”
Section: Cleaning Efficiencysupporting
confidence: 81%