Theoretical and experimental mass-sensitivity analysis of polymer-coated SAW and STW resonators for gas sensing applications

Polymer coated thin film plate acoustic resonators (FPAR) for gas sensing applications

“…However, increased sensitivity must not necessarily be the best choice for a practical system. Generally, improved mass sensitivity should correlate with improved damping especially at thicker layers [16]. This aspect is further theoretically studied for the S0 Lamb mode in comparison to RSAW and Love waves on ATcut quartz.…”

“…The latter determines the frame where the use of S0 Lamb wave can be beneficial. The use of relatively thin sensing films seems to be preferable, similarly to the case of surface transverse waves (STW) [16]. Further, the layer viscosity itself influences the S0 mass sensitivity especially for pp-HMDSO layers with relative thicknesses h/λ > 1% (see Fig.…”

STW resonator with organo-functionalized metallic nanoparticle film for vapor sensing

“…The thickness of the film is of the order of 20 nm. The resonator has aluminum electrodes and belongs to the series used in the experiments in [7]. The active surface of the electroded area is 1.5 mm 2 .…”

“…It has been shown that sTW are suited to measurements of surface-attached mass under fluid immersion, and that the mass sensitivity of such an sTW sensor is approximately 10 times greater than that of a quartz microbalance sensor [5]. These waves are equally applicable to chemical gas sensors where the sensitivity is usually greater than that of their saW counterparts [6], [7].…”

Thin film electroacoustic resonators for physical and chemical sensing

“…Particularly, Rayleigh-SAWs in delay line structures, using ST-cut quartz or LiNbO3, have been used as chemical sensors [98]- [101]. Love wave-based or surface transverse waves (STW) devices are more frequently applied in liquid environments, however they have also been used in gaseous media as mass detectors [102]- [105].…”