The Use of Copper Oxide Thin Films in Gas-Sensing Applications

Rydosz, Artur

doi:10.3390/coatings8120425

Cited by 109 publications

(60 citation statements)

References 80 publications

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“…The gas-sensitive layer was based on the copper oxide (CuO), which was previously confirmed to be a good gassensitive material in various measurement methods [40][41][42][43][44]. The CuO thin films were deposited by the magnetron sputtering system with a glancing angle deposition technique (GLAD).…”

Section: Gas-sensitive Layermentioning

confidence: 99%

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Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Andrysiewicz

Krzemiński

Skarżyński

et al. 2020

Electron. Mater. Lett.

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Gas sensors are widely used in many industrial and home applications. There is therefore continued need to develop novel gas sensor substrates which provide good mechanical and electrical stability, and good flexibility in comparison with the conventional alumina and silicon-based materials. In this paper, we present the experimental results on flexible gas sensors based on the Kapton foil and alumina substrate covered by copper oxide as a gas-sensitive layer. These sensors exhibited good mechanical stability and gas-sensing characteristics. The Kapton-based CuO gas sensors were tested under exposure to acetone in the 0.05-1.25 ppm range (150 °C, 50%RH). The results confirmed that sensors deposited on the flexible substrate such as Kapton can be used in the exhaled breath analyzers dedicated to diabetes biomarker detection or other applications for which the elastic substrate is needed. Graphic Abstract

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Section: Gas-sensitive Layermentioning

confidence: 99%

“…Due to the low-intensity of diffraction peaks logarithmic scale was used to show the intensity curves along the y-axis. The XRD patterns for alumina-based CuO gas sensors were previously presented and discussed in [40][41][42][43][44].…”

Section: Characterizationmentioning

confidence: 99%

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Andrysiewicz

Krzemiński

Skarżyński

et al. 2020

Electron. Mater. Lett.

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“…Generally, a gas sensor consists of gas-sensitive films and gas sensor substrate with electrodes, a package, and front-end electronic circuits. The gas-sensitive layer can be realized based on various materials, including organic compounds (e.g., phthalocyanines [2,3]) and metal oxides [4] (e.g., WO 3 [5,6], TiO 2 [7,8], SnO 2 [9,10], In 2 O 3 [11,12], Fe 2 O 3 [13,14], MoO 3 [13,15], ZnO [16][17][18], CuO [19][20][21][22][23][24][25][26][27][28]). The most common methods for metal oxide depositions are magnetron sputtering [29,30], sol-gel [31,32], thermal oxidation [33,34], hydrothermal techniques [35,36], the spray pyrolysis technique [37,38], and the microwave-assisted method [39,40].…”

Section: Introductionmentioning

confidence: 99%

GLAD Magnetron Sputtered Ultra-Thin Copper Oxide Films for Gas-Sensing Application

et al. 2020

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Copper oxide (CuO) ultra-thin films were obtained using magnetron sputtering technology with glancing angle deposition technique (GLAD) in a reactive mode by sputtering copper target in pure argon. The substrate tilt angle varied from 45 to 85° and 0°, and the sample rotation at a speed of 20 rpm was stabilized by the GLAD manipulator. After deposition, the films were annealed at 400 °C/4 h in air. The CuO ultra-thin film structure, morphology, and optical properties were assessed by X-ray diffraction (XRD), energy-dispersive X-ray spectroscopy (EDX), X-ray reflectivity (XRR), and optical spectroscopy. The thickness of the films was measured post-process using a profilometer. The obtained copper oxide structures were also investigated as gas-sensitive materials after exposure to acetone in the sub-ppm range. After deposition, gas-sensing measurements were performed at 300, 350, and 400 °C and 50% relative humidity (RH) level. We found that the sensitivity of the device is related to the thickness of CuO thin films, whereas the best results are obtained with an 8 nm thick sample.

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“…The investigation results show that CuO is stable under exposure to various gases (nitrogen oxides, carbon oxides, volatile organic compounds, ammonia, etc. ), and relatively low changes in base resistivity were observed [23]. So, gas sensors based on silicon-carbon/CuO films, fabricated in the present work, were examined for the detection of CO and CH 4 molecules.…”

mentioning

confidence: 97%

“…The purpose of this work is to compare the gas sensitive characteristics of two different types gas sensors.We used CuO, as it the most widely-studied oxide of all copper oxides in terms of sensing applications. CuO is a typical p-type semiconductor with many remarkable properties, including catalytic activity and high stability [21][22][23][24]. The investigation results show that CuO is stable under exposure to various gases (nitrogen oxides, carbon oxides, volatile organic compounds, ammonia, etc.…”

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confidence: 99%

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

et al. 2019

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In this study, we designed two types of gas-sensor chips with silicon–carbon film, doped with CuO, as the sensitive layer. The first type of gas-sensor chip consists of an Al2O3 substrate with a conductive chromium sublayer of ~10 nm thickness and 200 Ω/□ surface resistance, deposited by magnetron sputtering. The second type was fabricated via the electrochemical deposition of a silicon–carbon film onto a dielectric substrate with copper electrodes formed by photoelectrochemical etching. The gas sensors are sensitive to the presence of CO and CH4 impurities in the air at operating temperatures above 150 °C, and demonstrated p- (type-1) and n-type (type-2) conductivity. The type-1 gas sensor showed fast response and recovery time but low sensitivity, while the type-2 sensor was characterized by high sensitivity but longer response and recovery time. The silicon–carbon films were characterized by the presence of the hexagonal 6H SiC polytype with the impurities of the rhombohedral 15 R SiC phase. XRD analysis revealed the presence of a CuO phase.

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The Use of Copper Oxide Thin Films in Gas-Sensing Applications

Cited by 109 publications

References 80 publications

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

Flexible Gas Sensor Printed on a Polymer Substrate for Sub-ppm Acetone Detection

GLAD Magnetron Sputtered Ultra-Thin Copper Oxide Films for Gas-Sensing Application

Fabrication of Gas-Sensor Chips Based on Silicon–Carbon Films Obtained by Electrochemical Deposition

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