2022 IEEE 16th International Conference on Solid-State &Amp; Integrated Circuit Technology (ICSICT) 2022
DOI: 10.1109/icsict55466.2022.9963299
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The Performance Enhancement of Polysilicon Microbolometer in Standard CMOS Technology with Si3N4 Film

Yaozu Guo
1
,
Haolan Ma
2
,
Wancheng Zhu
3
et al.
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