2009
DOI: 10.4028/www.scientific.net/kem.416.154
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Tong Xing, Hai Hui Zheng, Wei Li

Abstract: Double-sided polishing machine is widely used to high precision dimension, high accuracy surface, and ultra-smooth surface without damage layer for some hard and brittle workpiece such as silicon wafer, sapphire, ceramic, magnetic substrates, electronic materials, etc. Pneumatic loading system is the very crucial part of the double-sided polishing machine. The polishing machine’s performances are directly determined by the loading precision. This paper establishes the modeling and simulation of pneumatic load …

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