1989
DOI: 10.1143/jjap.28.1762
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The Influence of the Si-H2 Bond on the Light-Induced Effect in a-Si Films and a-Si Solar Cells

Abstract: The influence of the Si-H2 bond on light-induced degradation and the thermal recovery of a-Si films and a-Si solar cells were studied. The influence of the Si-H2 bond on light-induced degradation depends on the impurity content in a-Si films, and light-induced degradation can be reduced by decreasing the Si-H2 bond density in a-Si films with impurity content of 1018 cm-3. The activation energy of the thermal recovery process was about 1.0 eV, and it did not depend on the Si-H2 bond density. However, an irrever… Show more

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Cited by 101 publications
(37 citation statements)
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“…At maximum d ms , we obtained the lowest hydrogen concentration (Si-H ¼ 4 at.%, Si-H 2 < 1 · 10 20 cm À3 ) at the substrate temperature of 250°C. As has been suggested by earlier works, low C SiH 2 films should degrade less [2][3][4][5]. It was indeed confirmed in the triode-deposited films, where excellent stability against light soaking was observed in their spin densities as well as the fill-factors of their related Schottky diodes [8].…”
Section: Introductionsupporting
confidence: 68%
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“…At maximum d ms , we obtained the lowest hydrogen concentration (Si-H ¼ 4 at.%, Si-H 2 < 1 · 10 20 cm À3 ) at the substrate temperature of 250°C. As has been suggested by earlier works, low C SiH 2 films should degrade less [2][3][4][5]. It was indeed confirmed in the triode-deposited films, where excellent stability against light soaking was observed in their spin densities as well as the fill-factors of their related Schottky diodes [8].…”
Section: Introductionsupporting
confidence: 68%
“…Those films are expected to show higher stability against light soaking because of their low Si-H 2 densities [2][3][4][5], and indeed, we observed excellent stability in the fill-factors (FF) of their related Schottky diodes [8]. While the initial FFs are the same in the triode and diode cases ($54%), their stable values are: triode ¼ 52% and diode ¼ 47%, respectively.…”
Section: Properties Of the Triode-deposited A-si:hmentioning
confidence: 73%
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“…In sample G, however, both Si-H and Si-H 2 bonds did not exist, meaning that T S = 80 • C is not sufficient to form Si-H bonds. It was reported by Nakamura et al, 28 that the Si-H 2 bonds are responsible for light-induced degradation of a-Si solar cells. On the basis of these results, we chose the PD method rather than the CD method and went forward to the next experiment.…”
Section: Samplementioning
confidence: 95%
“…1], decreasing the defect density from 10 20 cm -3 for unhydrogenated a-Si to 10 16 cm -3 for a-Si:H. R* is correlated to the Staebler-Wronski Effect (SWE) [e.g. 56,57], showing a more significant SWE when R* is larger. The hydrogen concentration of ETP material deposited at 7 nm/s decreases with increasing deposition temperature and is lower than 10% above 300ºC.…”
Section: Materials Properties Of Hydrogenated Amorphous Siliconmentioning
confidence: 99%