1996
DOI: 10.1016/0042-207x(95)00178-6
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The effects of a quadrupole mass analyser on measurement of UHV residual gas composition

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Cited by 5 publications
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“…In order to activate a getter, it is necessary to work at high temperature [2][3][4][5] and the activation process at high temperature and outgassing damages the devices. Extensive efforts have been made with respect to nonevaporable getters, especially by using Zr or Zr alloy.…”
Section: Introductionmentioning
confidence: 99%
“…In order to activate a getter, it is necessary to work at high temperature [2][3][4][5] and the activation process at high temperature and outgassing damages the devices. Extensive efforts have been made with respect to nonevaporable getters, especially by using Zr or Zr alloy.…”
Section: Introductionmentioning
confidence: 99%