TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300625
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The Effect of Substrate Doping on the Behaviour of a CMOS Electrothermal Frequency-Locked-Loop

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Cited by 7 publications
(7 citation statements)
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“…The former is essentially process independent [8], [9], while variations in the latter are caused by lithographic inaccuracy and can be mitigated by making the filter's dimensions sufficiently Manuscript large. Therefore, the delay of an ETF can be used as the basis for an accurate temperature sensor: untrimmed inaccuracies of between 0.5 C and 0.7 C ( ) have been achieved over the industrial temperature range ( 40 C to 105 C) [7], [9], [10]. In [7], a temperature-to-frequency converter was realized by incorporating an ETF in a frequency-locked loop (FLL).…”
Section: Introductionmentioning
confidence: 99%
“…The former is essentially process independent [8], [9], while variations in the latter are caused by lithographic inaccuracy and can be mitigated by making the filter's dimensions sufficiently Manuscript large. Therefore, the delay of an ETF can be used as the basis for an accurate temperature sensor: untrimmed inaccuracies of between 0.5 C and 0.7 C ( ) have been achieved over the industrial temperature range ( 40 C to 105 C) [7], [9], [10]. In [7], a temperature-to-frequency converter was realized by incorporating an ETF in a frequency-locked loop (FLL).…”
Section: Introductionmentioning
confidence: 99%
“…16, as well as the simulated characteristics. These characteristics were obtained by inverting (10) and then performing an 8th order least-squares polynomial fit on the measured data, i.e., the output of the PT-100 sensor and the decimated output of the chips. Due to their different geometries, the slope of their phase characteristics is significantly different.…”
Section: Measurement Resultsmentioning
confidence: 99%
“…3) acts to balance the average charge accumulated by the integrator: (9) where is a number between 0 and 1, which represents as a weighted average of the two phase references, , and : (10) If and are close to 90 degrees, the cosine function can be linearized, leading to a linear relation between and :…”
Section: System Designmentioning
confidence: 99%
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“…At a given frequency, the amount of phase shift will be determined by the ETF's geometry and by the thermal diffusivity of bulk silicon. Since the latter is well defined, the accuracy of this phase shift will be mainly limited by lithographic inaccuracy [1,4].…”
Section: Introductionmentioning
confidence: 99%