“…The efficiency, power output and steady state operation of MEMS/NEMS devices can be critically influenced by adhesion, friction, and wear (Bhushan 1998(Bhushan , 2003(Bhushan , 2004(Bhushan , 2005Liu and Bhushan 2004a, b;Bhushan and Liu 2004a). Further, adhesion and friction are known to show dependence on the operating parameters, such as relative sliding velocity and environmental conditions, e.g., relative humidity (RH) and temperature (Liu et al 1996;Lio et al 1997;Schoenherr and Vancso 1999;Tian et al 1999;Clear and Nealey 2001;Bhushan 2002, 2003;Bhushan and Liu 2004b;Bhushan et al 2004;Kasai et al 2005;Bhushan 2004, 2005a, b, c, d). This has necessitated the application of low friction and low adhesion, ultrathin lubricant films for the protection of contacting surfaces in MEMS/NEMS.…”