DOI: 10.1109/plasma.2004.1339972
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J. Wang, S.C.H. Kwok, N. Huang, P. Yang, Y.X. Leng, J.Y. Chen, H. Sun, P.K. Chu

Abstract: Acetylene (C,H,) plasma immersion ion implantation and deposition(PIII-D) was performed on polyethylene terephthalate (PET) at different bias voltages from -5KV to -1SKV. The surface structure ofthe