TEUS: high-brightness EUV LPP light source based on fast rotating target: product overview and specifications

Krivokorytov, M. S.; Koshelev, K. N.; Vinokhodov, A Yu; Yakushev, O. F.; Ivanov, V. V.; Krivtsun, V. M.; Lash, A. A.; Medvedev, Vyacheslav; Gubarev, V.; Glushkov, Denis D; Ellwi, Samir; Gorsky, E V; Kiselev, Alexey Prohorovich

doi:10.1117/12.2601008

Cited by 2 publications

(2 citation statements)

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“…EUV transmittance measurements of a free-standing SWCNT membrane were carried out in a chamber of the TEUS-S-100 light source [36], which employs pulsed laser radiation at the wavelength of 1.064 μm with the following parameters: an average output power of 100 W, energy of each pulse of 4 mJ, pulse repetition rate of 25 kHz, and pulse width of 1.5 ns (Nd: YVO4 laser system from EdgeWave [37]).…”

Section: Methodsmentioning

confidence: 99%

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Renewable Single-Walled Carbon Nanotube Membranes for Extreme Ultraviolet Pellicle Applications

Benavides¹,

Krasnikov²,

Gubarev³

et al. 2022

SSRN Journal

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Section: Methodsmentioning

confidence: 99%

“…The renewal abilities of the SWCNT pellicles were assessed within the industrial TEUS-S-100 EUV light source [36]. The laser beam was focused on the liquid target (In/Sn alloy with the mass proportion of 48/52) surface with a focal spot size of 60 μm (1/e 2 intensity level).…”

Section: In Situ Renewalmentioning

confidence: 99%

Renewable Single-Walled Carbon Nanotube Membranes for Extreme Ultraviolet Pellicle Applications

Benavides¹,

Krasnikov²,

Gubarev³

et al. 2022

SSRN Journal

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Ar permeability through densified single-walled carbon nanotube-based membranes

Gubarev

Krivokorytov

Krivtsun

et al. 2023

Journal of Applied Physics

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Single-walled carbon nanotube (SWCNT)-based membranes (pellicles) and gas counterflows are used as a debris mitigation system in extreme ultraviolet (EUV) lithography. Densification with volatile liquids is a well-known approach to tune the performance of SWCNT membranes. However, densification can change the gas permeability through SWCNT membranes, violating the circulation of buffer gas counterflows. In the present work, we investigate the Ar permeability through SWCNT membranes before and after densification with isopropyl alcohol in the pressure drop test. The effective diffusivity of Ar through pristine and densified SWCNT membranes is, respectively, calculated to be Deffpristine = 330 × 109 m2 s−1 and Deffdensified = 4 × 109 m2 s−1. We developed a probabilistic model of gas penetration through SWCNT membranes. On the basis of the experimental data, the probabilities of Ar atoms penetrating through pristine and densified SWCNT membranes are estimated to be 8% and 0.1%, respectively. Structural changes in SWCNT membranes after densification with scanning electron microscopy and the Brunauer–Emmett–Teller technique are demonstrated. The bulk density of SWCNT membranes, measured using x-ray reflectometry, is found to be 0.38 and 0.89 g/cm3 before and after densification, respectively. The temporal dynamic of isopropyl alcohol evaporation from the volume of SWCNT membranes is analyzed using Fourier-transform infrared spectroscopy (FTIR). Results obtained using EUV and FTIR spectroscopy show that isopropyl alcohol is present in the volume of the SWCNT membrane even after the membrane has been left in vacuum (P < 0.01 Pa) for 22 h.

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TEUS: high-brightness EUV LPP light source based on fast rotating target: product overview and specifications

Cited by 2 publications

References 0 publications

Renewable Single-Walled Carbon Nanotube Membranes for Extreme Ultraviolet Pellicle Applications

Renewable Single-Walled Carbon Nanotube Membranes for Extreme Ultraviolet Pellicle Applications

Ar permeability through densified single-walled carbon nanotube-based membranes

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