Essex Junction, VTTHE DEVELOPMENT of 32K, 36K and 64K 1 D RAMS"^ has been aided by the application of evaluation procedures t o identify and quantify the reasons for yield loss. Computer-controlled test systems were used to obtain basic process and device parameters from kerf structures and functional test data by test, including bit fail maps, from the memory chip. Two computer analysis techniques (Test Sequence Limited Yield (TSLY) and Array Diagnostics) were used to determine fail modes from the functional…
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