2017
DOI: 10.1364/ol.42.001875
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Terahertz multilevel phase Fresnel lenses fabricated by laser patterning of silicon

Abstract: Multilevel phase Fresnel lenses (MPFLs) with a high numerical aperture for 0.58 THz frequencies were developed. The components based on a monocrystalline silicon wafer are prepared by patterning by a high-speed industrial-scale laser direct writing (LDW) system. Two consistent series of the terahertz-MPFLs with phase quantization levels varying between 2 and the continuous kinoform shape for the focal lengths of 5 and 10 mm were produced employing inherent flexibility of the LDW fabrication process. The focusi… Show more

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Cited by 57 publications
(37 citation statements)
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“…Silicon is a highly suitable dielectric material for this purpose, as intrinsic silicon can have very low dissipation, and mature etching techniques are well-suited to produce a quasi-planar device with a finite number of levels. [98][99][100] These devices were significantly thinner than traditional lenses; the latter cited work had a device thickness of less than 500 µm. In another work, the negative shape of a stepped-lens structure was etched into silicon, and this was used in a stamp-like manner to imprint a stepped-phase focusing structure into a commonly used terahertz transparent polymer known as polypropylene.…”
Section: Wrapped Phasementioning
confidence: 99%
“…Silicon is a highly suitable dielectric material for this purpose, as intrinsic silicon can have very low dissipation, and mature etching techniques are well-suited to produce a quasi-planar device with a finite number of levels. [98][99][100] These devices were significantly thinner than traditional lenses; the latter cited work had a device thickness of less than 500 µm. In another work, the negative shape of a stepped-lens structure was etched into silicon, and this was used in a stamp-like manner to imprint a stepped-phase focusing structure into a commonly used terahertz transparent polymer known as polypropylene.…”
Section: Wrapped Phasementioning
confidence: 99%
“…3. Peak signal of the THz detector dependence on the phase quantization number P. Theory is diffractive efficiency of the Si-lens depending on the number of phase quantization levels [5].…”
Section: Resultsmentioning
confidence: 99%
“…The group of the 17.5 mm diameter MPFL contained five samples with a different number of phase quantization levels for each focal distance allowing to figure out the optimal phase quantization level [5]. Radii and depths of the subzones were calculated according to the methodology presented in [7].…”
Section: Samples and Fabricationmentioning
confidence: 99%
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“…The rate of removal of the laser‐induced excavated material also affects the feature profile. For example, the laser patterning technique has been employed in the fabrication of microfluidic channels, machining of optical waveguides in silica, and designing grating structure in fibers …”
Section: Lossless Dielectric Materialsmentioning
confidence: 99%